3-Dimensional comb structure and actuator and inertia detection sensor both using the comb structure

An inertia detection sensor adopting a 3-dimensional comb structure comprising:

• a substrate;
• a suspension structure separated a predetermined height from the substrate, maintaining the predetermined height therefrom, such that the suspension structure can vibrate over the substrate;
• at least one elastic member connected to the suspension structure, for supporting the suspension structure so that the suspension structure makes an inertial movement;
• a movable comb having at least one comb finger, the movable comb protruding from the suspension structure;
• a fixed comb having at least one comb finger, the fixed comb fingers protruding from the substrate opposite to and in mesh with the movable comb fingers;
• and
• a sensing unit for detecting an acceleration by sensing a capacity change between the movable comb and the fixed comb.

An actuator adopting a 3-dimensional comb structure comprising:

• a substrate;
• a suspension structure separated a predetermined height from the substrate, maintaining the predetermined height therefrom, such that the suspension structure can vibrate over the substrate;
• at least one elastic member connected to the suspension structure, for supporting the suspension structure so that the suspension structure makes an inertial movement;
• a movable comb having at least one comb finger, the movable comb protruding from the suspension structure;
• a fixed comb having at least one comb finger, the fixed comb fingers protruding from the substrate opposite to and in mesh with the movable comb fingers;
• and
• a power supply for providing a voltage between the movable comb and the fixed comb to excite the suspension structure.