Device scanning in a raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process
OwnerPeter Heilandinventor
Life of this patent
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Abstract
A device which scans in a raster mode, in particular to a raster microscope, provides a rapid and inexpensive compensation of the disturbing effects of mechanical vibrations on the scanning process. The device includes a sensor for sensing mechanical vibrations and driving a filter whose output, together with the output of the device for the production of a z-signal, is connected to an adder, the output of which drives the device for changing the distance between the specimen and the sensor.
Claims14
A device that scans in raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process, comprising:
- a scanning sensor (5) that provides a measurement signal (S4) that depends on the distance of said scanning sensor (5) from a specimen (7),
- a displacement device that displaces said specimen (7) and said scanning sensor (5) relative to each other
- a distance changing device that changes the distance between said specimen (7) and said scanning sensor (5),
- an adder (4),
- a device (6) connected after said scanning sensor (5) that provides an adjusting signal (S5) for adjusting said distance between said specimen (7) and said scanning sensor (5) to said adder (4),
- a vibration sensor (2) that senses mechanical vibrations, and
- a filter (3) driven by said vibration sensor (2), the output of which, together with the output of said device (6) is connected to said adder (4),
- wherein the output of said adder (4) drives said distance changing device that changes the distance between said specimen (7) and said scanning sensor (5).
A process for operation of a device that scans in a raster mode with compensation of disturbing effects of mechanical vibrations on the scanning process, comprising:
- displacing a scanning sensor (5) relative to a specimen (7),
- sensing and providing measuring signals depending on the distance of said scanning sensor (5) from said specimen (7),
- sensing mechanical vibrations by a vibration sensor (2),
- driving a filter (3) by sensed signals from said vibration sensor (2),
- applying output signals from said filter (3) together with output signals from a device (6) that provides an adjusting signal to the input of an adder (4), and
- applying output signals of said adder (4) to control a device for changing said distance between said specimen (7) and said scanning sensor (5) to substantially compensate for the disturbing effect of mechanical vibrations.
Dependencies are inferred from the claim text.