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US 6,307,917 B1Granted
Soller slit and X-ray apparatus
AssigneeRigaku Corporation
InventorsKatsuhiko Shimizu, Kazuhiko Omote, Go Fujinawa
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AssigneeRigaku Corporation
InventorsKatsuhiko Shimizu, Kazuhiko Omote, Go Fujinawa
Estimating the term…
A soller slit includes a plurality of metal foils and a plurality of spacers. The spacers are laminated alternatively with the metal foils to support one end portions of the metal foils with a space between adjacent metal foils. The other end portions of the metal foils are opened to be unsupported as a free end. When the soller slit is used in an X-ray apparatus, other X-ray optical components, such as monochromator or a specimen to be analyzed, then the soller slit can be arranged in contact with or in the vicinity of the unsupported end portions of the soller slit. That is, it is possible to unify the soller slit and other X-ray optical components in an assembled state. Therefore, a space dedicated to the soller slit becomes unnecessary. Further, since it is possible to shorten a passage of X-rays correspondingly, attenuation of X-rays to be detected by the X-ray detector can be avoided.
A soller slit comprising a plurality of metal foils and a plurality of spacers,
An X-ray apparatus comprising an X-ray source for generating X-rays, an X-ray detector for detecting X-rays diffracted by a specimen after being generated from said X-ray source, and a soller slit, wherein
An X-ray apparatus comprising an X-ray source for generating X-rays, an X-ray detector for detecting X-rays diffracted by a specimen after being generated from said X-ray source, a monochromator for making X-rays generated by said X-ray source or X-rays diffracted by said specimen monochromatic, and a soller slit, wherein
Dependencies are inferred from the claim text.