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US 6,307,730 B1Granted
Capacitor formed by lower electrode having inner and outer uneven surfaces
AssigneeNEC Corporation
InventorNobuyuki Yamanishi
Life of this patent
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Abstract
A capacitor is constructed by a cylindrical lower capacitor electrode layer having uneven inner and outer surfaces, a capacitor insulating layer formed on the cylindrical lower capacitor electrode layer, and an upper capacitor electrode layer formed on the capacitor insulating layer.
Claims5
A capacitor comprising:
- a cylindrical lower capacitor electrode layer having uneven inner and outer surfaces;
- a capacitor insulating layer formed on said cylindrical lower capacitor electrode layer;
- and
- an upper capacitor electrode layer formed on said capacitor insulating layer,
- wherein said uneven inner and outer surfaces of said cylindrical lower capacitor electrode layer are obtained by transferring and subsequently removing hemi-spherical grained polycrystalline silicon.
2 more elements
A capacitor comprising:
- a cylindrical lower capacitor electrode layer having uneven inner and outer surfaces;
- a capacitor insulating layer formed on said cylindrical lower capacitor electrode layer;
- and
- an upper capacitor electrode layer formed on said capacitor insulating layer,
- wherein said cylindrical lower capacitor electrode layer is made of one of metal and metal compound.
2 more elements
A capacitor comprising:
- a cylindrical lower capacitor electrode layer having uneven inner and outer surfaces;
- a capacitor insulating layer formed on said cylindrical lower capacitor electrode layer;
- and
- an upper capacitor electrode layer formed on said capacitor insulating layer,
- wherein said cylindrical lower capacitor electrode layer is made of tungsten.
2 more elements
A capacitor comprising:
- a cylindrical lower capacitor electrode layer having uneven inner and outer surfaces;
- a capacitor insulating layer formed on said cylindrical lower capacitor electrode layer;
- and
- an upper capacitor electrode layer formed on said capacitor insulating layer,
- wherein said cylindrical lower capacitor electrode layer is made of titanium nitride.
2 more elements
Dependencies are inferred from the claim text.