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US 6,307,447 B1Granted
Tuning mechanical resonators for electrical filter
AssigneeAgere Systems Guardian Corp.
InventorsBradley Paul Barber, Yiu-Huen Wong, Peter L. Gammel
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AssigneeAgere Systems Guardian Corp.
InventorsBradley Paul Barber, Yiu-Huen Wong, Peter L. Gammel
Estimating the term…
The present invention is a method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, in a case where the resonant frequencies of the resonators are a function of each resonator thickness. According to this method the resonators are each formed with an etchable top electrode layer which includes a material having different etching properties as a topmost layer for each of the resonators having different resonant frequencies. By selectively etching these etchable layers one at a time in the presence of the others, one may adjust the resonant frequencies of each of the resonators without need to mask the resonators during the etching process. Associated with this method there is a resonator structure having a top electrode structure having a topmost layer having different etching characteristics for different resonators.
A method for adjusting different resonant frequencies of a plurality of mechanical resonators formed on a common substrate, wherein the resonant frequencies of said resonators are a function of each resonator thickness, the method comprising forming said resonators with an etchable layer comprising a material having different etching properties for each of said resonators having different resonant frequencies and selectively etching said etchable layers to adjust the resonant frequencies of said resonators.
A method for adjusting a resonant frequency of at least a first and a second mechanical resonator comprising elements of an electrical filter, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, wherein the resonant frequency of each resonator is a function of an overall resonator thickness, the method comprising:
An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, each of said resonators having been etched to its respective thickness.
An electrical filter comprising at least a first and a second mechanical resonators each having a distinct resonant frequency, each of said resonators comprising a mechanical energy transducer between a top and a bottom electrode, each of the resonators having a thickness, the resonant frequency of each of said resonators being a function of each resonator thickness, the first of said resonators having its top electrode comprising a material having etching properties different from the top electrode of said second resonator, wherein the resonant frequency of said resonators of said filter have been adjusted by a process comprising:
Dependencies are inferred from the claim text.