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US 6,307,163 B1Granted
Chemical mixer tank calibrator and calibrating method for the same
AssigneeUnited Microelectronics Corp.
InventorsChien-Hsin Lai, Fu-Yang Yu
Life of this patent
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Abstract
A chemical mixer tank calibrator and a calibrating method for the same. The chemical mixer tank calibrator calibrates the weight of the mixer tank through a step motor. Once the chemical in the mixer tank is used up, the mixer tank can be automatically filled with chemical. Thus, the chemical in the mixer tank can adequately supply the buffer tank and the machine at any given time.
Claims7
A method for calibrating a chemical mixer tank used in a chemical supplying device, wherein the chemical mixer tank is connected to a buffer tank through a conveying pipe, the method comprising:
- a) setting an initial reference of a reference value Y to zero;
- b) activating a mixer tank pump to convey chemical from the mixer tank to the buffer tank when a liquid level is lower than a first level of the buffer tank, otherwise, iterating steps a) and b);
- c) activating the mixer tank pump for about 1 minute to about 5 minutes;
- d) stopping calibrating when the liquid level reaches a second level, wherein the second level is higher than the first level, otherwise, proceeding to a next step e);
- e) initiating a step motor for performing a weight calibration on the chemical mixer tank by lifting the mixer tank upward so as to reduce a reading from a weight measurement, and adding one to the reference value Y;
- f) repeating steps c) to e) until Y reaches five;
- g) initializing the step motor;
- and
- h) triggering the alarm.
6 more elements
Dependencies are inferred from the claim text.