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US 6,306,990 B1Granted
Film-forming polymers
AssigneeSiemens Aktiengesellschaft
InventorsStefan Hien, Michael Sebald
Life of this patent
Estimating the term…
Abstract
Film-forming, functionalized polymers having 1,2-dicarboxylic acid monoester groups have at least two polymer units, one of which is acid-labile and hydrolysis-stable and the other is thermally stable. These polymers are used in particular in photoresists.
Claims21
A film-forming polymer functionalized with 1,2-dicarboxylic acid monoester groups, comprising an acid-labile, hydrolysis-stable polymer unit (A) of structure:
- a thermally stable polymer unit (B) of structure:
- a second thermally polymer unit (C) of structure
- and a polymer unit (D) bearing reactive groups and having a structure
- in which the amount of (A) is from 1 to 99 mol %, the amount of (B) is from 1 to 99 mol %, the amount of (C) is from 0 to 50 mol %, and the amount of (D) is from 0 to 50 mol %, provided that the amounts of (A), (B), (C), and (D) total 100 mol %;
- and in which
- n=0, 1, 2 or 3,
- R1 is a hydrocarbon radical which is bonded via a tertiary C atom to the O atom and having a total of 4 to 10 C atoms, or a 2-tetrahydrofuranyl or 2-tetrahydropyranyl radical, R2, R3 and R4—independently of one another—are C1- to C6- alkyl or C1- to C6- alkoxy, C6- to C18- aryl or C6- to C18- aryloxy or aralkyl having a C6- to C18- aryl group and a C1- to C4- alkylene radical,
- R5 is H or C1- to C6- alkyl,
- R6, R7, R8 and R9—independently of one another—are H, C1- to C6- alkyl, C6- to C18- aryl, halogen, CN, methoxyphenyl or a radical of structure
- where
- R15 is H, C1- to C6- alkyl, C6- to C18- aryl, CH2═CH—, CH2═CH—CH2—, or CH2═CH—CO—;
- R10 is H, C1- to C6- alkyl, C2- to C6- alkenyl, C6- to C18- aryl, halogen or halogen-substituted C1- to C6- alkyl;
- R11 and R12—independently of one another—are linear C1- to C18- alkyl;
- R13 and R14—independently of one another—are linear C1- to C18- alkyl or tert-butyl;
- X is Si or Sn, and
- Y is O or NH.
13 more elements
Dependencies are inferred from the claim text.