Method of manufacture of a shape memory alloy ink jet printer
AssigneeSilverbrook Research Pty Ltd
InventorKia Silverbrook
Life of this patent
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Abstract
A method of manufacturing a shape memory alloy ink jet printhead wherein an array of nozzles are formed on a substrate utilizing planar monolithic deposition, lithographic and etching processes. Multiple ink jet heads are formed simultaneously on a single planar substrate such as a silicon wafer. The printheads can be formed utilizing standard VLSI/ULSI processing and can include integrated drive electronics formed on the same substrate. The drive electronics preferably being of a CMOS type. In the final construction, ink can be ejected from the substrate substantially normal to the substrate plane.
Claims7
A method of manufacture of an ink jet printhead arrangement including a series of nozzle chambers, said method comprising the steps of:
- (a) utilizing an initial semiconductor wafer having an electrical circuitry layer and a buried epitaxial layer formed thereon on;
- (b) etching a nozzle chamber in said wafer and said electrical circuitry layer;
- (c) depositing and etching a layer of sacrificial material, filling said nozzle chamber;
- (d) depositing and etching a layer of shape memory alloy forming a conductive paddle structure over said nozzle chamber attached to said electrical circuitry layer;
- (e) back etching said semiconductor wafer to said epitaxial layer;
- (f) etching said epitaxial layer to define a nozzle ejection hole therein interconnecting with said nozzle chamber;
- (g) etching away said sacrificial layers.
Dependencies are inferred from the claim text.