Ink jet head and process for producing the same

A process for producing a fine structured article having alternating protrusions and void spaces, comprising the steps of:

• providing a transparent substrate having predetermined form and dimension to form a base plate member having front and back sides;
• coating a base wall member-forming material on the whole front side of the base plate member;
• coating a photosensitive material on the whole of the base wall member forming material coating;
• selectively removing the photosensitive material coating by photolithography to provide a base wall member pattern;
• using the photosensitive material of the base wall member pattern as a mask to selectively remove the underlying base wall member forming material coating, thereby forming a base wall member made of a light-impermeable material on the front side of the substrate;
• coating a partitioning member forming photosensitive material in a predetermined thickness on the whole of the front side of the substrate on which the base wall member has been provided;
• selectively exposing the partitioning member forming photosensitive material coating through the base wall member pattern to light directed through the back side of the base plate member, the partitioning member forming photosensitive material being sensitive to the exposing light, thereby rendering exposed areas of the partitioning member forming photosensitive material coating insoluble in a developing solution;
• and
• developing the exposed partitioning member forming photosensitive material to remove unexposed areas thereof, thereby forming partitioning members to provide the protrusions, thus producing a fine structured article comprising the base plate member, the base wall member provided on the base plate member in a pattern conforming to the void spaces, and the partitioning members on the base plate member in areas not occupied by the base wall member.