Method for the controlling of certain second phases in aluminum nitride
AssigneeInternational Business Machines Corporation
InventorsRichard A. Bates, Carla N. Cordero, Benjamin V. Fasano, David B. Goland, Robert Hannon, Lester W. Herron, Gregory M. Johnson, Andrew Reitter, Subhash L. Shinde, Lisa Studzinski
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