Substrate processing method

A method of processing a rectangular substrate for forming a resist film on the substrate for use in a liquid crystal display comprising steps of:

• (a) mounting the substrate on temperature controlling means which is capable of having a thermal influence on the substrate, and controlling temperature TH of the substrate by exerting a thermal influence upon the substrate from upper and lower surfaces thereof;
• (b) controlling temperature TR of a resist solution to be supplied to the substrate;
• (c) controlling at least one temperature TT of a support member selected from the group consisting of temperatures of a plurality of chucks coming into contact with the substrate when the substrate is transported, temperatures of a plurality of supporting pins coming into contact with the substrate when the substrate is lifted up from said temperature controlling means and temperatures of adsorption members coming into contact with the substrate when the substrate is held by vacuum adsorption;
• (d) detecting temperature TA of an atmosphere of a process space for applying the resist solution to the substrate, said temperature TA detected at a sensor located in a discharge passage;
• (e) setting a process target temperature TP for forming a resist film on the substrate;
• (f) controlling said temperature TH by controlling operation of at least step (c) on the basis of the process target temperature TP set in the step (e) and the temperature TA detected in the step (d);
• and
• (g) applying the resist solution to the substrate held rotatable and substantially horizontal by said support member, the substrate being surrounded by a rotary cup and a cover being disposed on said rotary cup to form a substantially closed space around the substrate, and the substrate and the rotary cup being rotated within said closed space to form a resist film on the substrate.