Inorganic permeation layer for micro-electric device
AssigneeNanogen, Inc.
InventorsJohn R. Havens, Michael K. Krihak, Charles H. Greef, Daniel E. Raymond, Michael J. Heller
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Abstract
The present invention pertains to a method of, and a device created by, depositing an inorganic permeation layer on a micro-electronic device for molecular biological reactions. The permeation layer is preferably sol-gel. The sol-gel permeation layer can be created with pre-defined porosity, pore size distribution, pore morphology, and surface area. The sol-gel permeation layer may also function as the attachment layer of the micro-electric device.
Claims24
An electronic device adapted to receive a solution comprising:
- a substrate;
- a plurality of selectively addressable electrodes on the substrate;
- a permeation layer overlying the electrodes, the permeation layer being
- a sol-gel composition;
- and
- an electric source for selectively addressing the electrodes.
An electronic device adapted to receive a solution comprising:
- a substrate;
- a plurality of selectively addressable electrodes on the substrate;
- and
- a permeation layer overlying the electrodes, the permeation layer being a silicon dioxide composition.
A method for forming an electronic device adapted to receive a solution comprising:
- providing a substrate;
- locating a plurality of selectively addressable electrodes on the substrate;
- and
- forming a permeation layer overlying the electrodes, the permeation layer being a sol-gel composition.
A method of forming a permeation layer for use on an electronic device comprising:
- mixing tetraethylorthosilicate, an alcohol, water and an acid to form a stock solution;
- mixing the stock solution with additional water and additional acid;
- adding additional alcohol;
- adding a surfactant to form a sol-gel solution;
- depositing the sol-gel solution on a substrate;
- spinning the substrate;
- and
- heating the substrate.
Dependencies are inferred from the claim text.