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US 6,306,311 B1Granted
Method to make a high data rate stitched writer for a giant magneto-resistive head
AssigneeHeadway Technologies, Inc.
InventorsCherng-Chyi Han, Chyu Jiuh Torng, Mao-Min Chen
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Abstract
A high data-rate stitched pole magnetic read/write-head combining sputtered and plated high magnetic moment materials and a method for fabricating same. The plating and stitching aspects of this fabrication allow the formation of a very narrow write-head, while the sputtering permits the use of high magnetic moment materials having high resistivity and low coercivity.
Claims25
A method for forming a high data-rate stitched pole magnetic read/write-head, comprising:
- providing a planarized GMR read-head structure having a lower magnetic shield, a first gap, a GMR magnetic field sensing device with side biasing pieces, a second gap, an upper magnetic shield and a dielectric or non-magnetic metal material;
- depositing by sputtering on the planarized upper magnetic shield and dielectric or non-magnetic metal material of said structure a first layer of HMM material;
- depositing on said first layer of HMM material a write gap layer;
- patterning and etching said write gap layer and forming a conducting via thereupon;
- depositing by sputtering a second layer of HMM on the said write gap layer;
- patterning said second HMM layer through a layer of photoresist;
- stripping said photoresist layer from HMM layer in preparation for a pole stitching process;
- depositing, by plating, an HMM pole piece on said second HMM layer;
- trimming the resulting fabrication, now comprising an upper magnetic shield, a first HMM layer, a write-gap layer, a second HMM layer and a plated pole piece;
- stitching a final pole piece top the trimmed fabrication.
7 more elements
Dependencies are inferred from the claim text.