Apparatus and method for monitoring fluorine ions
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFeng-Yi Yang, Wei-tien Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsFeng-Yi Yang, Wei-tien Huang
Estimating the term…
An apparatus and a method for determining concentration of fluorine ions in aqueous solutions are provided. In the apparatus, a pH sensor is provided for sensing a pH value of an aqueous solution to be determined. A pH controller is then used to compare the pH value determined with stored pH data to determine whether the aqueous solution is acidic or alkalinic. An acid dispenser or a base dispenser is then used to dispense either an acid or a base into the pH adjustment tank for adjusting the pH value of the aqueous solution to within a desirable range. For instance, for the detection of fluorine ions, a suitable pH range is between about 4 and about 10. After the pH value is stabilized in the aqueous solution, a fluorine ion sensor may be used to sense the fluorine ion concentration in the aqueous solution. A common acid and base which may be used to bring the pH value within the desirable range may be H2SO4 and NaOH.
An apparatus for determining concentration of fluorine ions in aqueous solutions comprising:
A method for determining concentration of fluorine ions in aqueous solutions comprising the steps of:
Dependencies are inferred from the claim text.