US 6,306,245 B1Granted

Plasma etching apparatus

OwnerMichihiko Yanagisawa, Shinya Iidainventors

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Abstract

A plasma etching method and apparatus are provided in which a distance between an ejection opening (20a) in a plasma generator (2) for ejecting an active species gas and a surface of an object to be etched can be changed to thereby shorten the time required for a surface flattening operation and reduce the cost of equipment as well. To this end, the ejection opening (20a) of a predetermined diameter is disposed in confrontation with a desired convex of the object to be etched in the form of a wafer (110). The active species gas in the form of an F gas (G) is ejected from the ejection opening (20a) to the convex to thereby flatten it through etching. A distance between the ejection opening and the convex is changed by means of a Z drive mechanism (4) to provide an etching area corresponding to an area of the convex, thus performing effective flattening of the wafer (110).

Claims4

Dependent claims

A plasma etching apparatus comprising:

plasma generating means having an ejection opening of a diameter for ejecting an active species gas excited by a plasma;
distance changing means for changing a distance between said ejection opening of said plasma generating means and a convex of an object being disposed in confrontation with said ejection opening;
a controller for reading out an area data and a height data of convex on the surface of the object from a recording medium in which these data are recorded and for outputting these data;
first control means for controlling a distance-changing operation of said distance changing means based on the area data output from said controller so as to ensure an etching area corresponding to area of the convex;
and
second control means for controlling a period of time of ejecting said active species gas so that the period of time of ejecting said active species gas is substantially proportional to the height data output from said controller.

3 more elements

Dependencies are inferred from the claim text.