Abrasive material for the needle point of a probe card
Assignees3M Innovative Properties Company, NEC Corporation
InventorsToshiro Maeda, Naoya Kamata, Kazuo Tanaka, Reiji Yoshizumi
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Abstract
An abrasive material for the needle point of a probe card which can effectively remove foreign matter adhering to the needle point of the probe, protect the needle point from damage and deformation, and prolong the life of the probe. The abrasive material for the needle point of a probe card comprises an abrasive layer including a layer of micropowdered abrasive grains applied to a substrate and a cushion layer having a buffer action and elasticity.
Claims6
An abrasive material for a needle point of a probe card comprising:
- an abrasive layer comprising an abrasive grain layer, which includes a layer of micro-powdered abrasive grains arranged at irregular intervals, applied to a substrate;
- and
- a cushion layer having a buffer action and elasticity, wherein the cushion layer is applied to the substrate of the abrasive layer.
An abrasive material for a needle point of a probe card comprising:
- an abrasive layer including a layer of micro-powdered abrasive grains applied to a substrate, wherein the surface of the abrasive layer contacting the needle point of the probe card has an irregular pattern corresponding to the pattern of the needle point of the probe card;
- and
- a cushion layer having a buffer action and elasticity, wherein the cushion layer is applied to the substrate of the abrasive layer.
An abrasive material for a needle point of a probe card comprising:
- an abrasive layer comprising an abrasive grain layer, which includes a layer of micro-powdered abrasive grains arranged at irregular intervals, applied to a surface of a substrate;
- and
- a cushion layer having a buffer action and elasticity, wherein the cushion layer is applied to the substrate of the abrasive layer;
- wherein the abrasive material reduces the wear of the needle point relative to an abrasive material having micro-powdered abrasive grains arranged at more regular intervals when used under the same conditions.
An abrasive material for a needle point of a probe card comprising:
- an abrasive layer comprising an abrasive grain layer, which includes a layer of micro-powdered abrasive grains arranged at irregular intervals, applied to a surface of a substrate;
- and
- a cushion layer having a buffer action and elasticity, wherein the cushion layer is applied to the substrate of the abrasive layer;
- wherein the abrasive material prolongs the life of the probe card relative to an abrasive material having micro-powdered abrasive grains arranged at more regular intervals when used under the same conditions.
Dependencies are inferred from the claim text.