Methods and apparatuses for planarizing microelectronic substrate assemblies

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the lubricating planarizing solution having glycerol as a viscosity-increasing lubricant additive, and the polishing pad having a body, a planarizing surface on the body, and abrasive particles fixedly attached to the body at the planarizing surface;
• mixing the glycerol into a non-abrasive solution comprising ammonia and water to form the lubricating planarizing solution prior to depositing the lubricating planarizing solution onto the polishing pad, the lubricating planarizing solution having a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• pressing a front face of the substrate assembly against the non-abrasive solution and the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface;
• and
• inhibiting the fixed abrasive particles attached to the pad from aggressively abrading the front face and causing defects on the substrate assembly by adding glycerol to the non-abrasive solution comprised of ammonia and water to form a lubricating planarizing solution having a viscosity of at least approximately 4-20 cp.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• adding glycerol to the non-abrasive solution to form a non-abrasive lubricating solution without abrasive particles, the non-abrasive lubricating planarizing solution being further comprised of ammonia and water mixed with the glycerol until the lubricating planarizing solution has a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of 10% by weight of glycerol into 90% by weight of a non-abrasive solution comprising ammonia and water;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of polypropylene glycol mixed into a non-abrasive solution comprising ammonia and water to form a solution having a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of 5% by weight of polypropylene glycol into 95% by weight of a non-abrasive solution comprising ammonia and water;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of polyethylene glycol mixed into a non-abrasive solution comprising ammonia and water to form a solution having a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of 10% by weight of polyethylene glycol into 90% by weight of a non-abrasive solution comprising ammonia and water;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of polyvinyl alcohol mixed into a non-abrasive solution comprising ammonia and water to form a solution having a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of 10% by weight of polyvinyl alcohol into 90% by weight of a non-abrasive solution comprising ammonia and water;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of CARBOPOL mixed into a non-abrasive solution comprising ammonia and water to form a solution having a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of 0.25% by weight of CARBOPOL into 99.75% by weight of a non-abrasive solution comprising ammonia and water;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of POLYOX mixed into a non-abrasive solution comprising ammonia and water to form a solution having a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly, comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface, the lubricating planarizing solution being further comprised of 0.25% by weight of POLYOX into 99.75% by weight of a non-abrasive solution comprising ammonia and water;
• pressing a front face of the substrate assembly against the lubricating planarizing solution and at least a portion of the fixed abrasive particles on the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion therebetween;
• and
• separating regions of the front face from the abrasive particles with the lubricating planarizing solution as the substrate assembly moves relative to the polishing pad.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the lubricating planarizing solution having polypropylene glycol as a viscosity-increasing lubricant additive, and the polishing pad having a body, a planarizing surface on the body, and abrasive particles fixedly attached to the body at the planarizing surface;
• mixing the polypropylene glycol into a non-abrasive solution comprising ammonia and water to form the lubricating planarizing solution prior to depositing the lubricating planarizing solution onto the polishing pad, the lubricating planarizing solution having a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the lubricating planarizing solution having polyethylene glycol as a viscosity-increasing lubricant additive, and the polishing pad having a body, a planarizing surface on the body, and abrasive particles fixedly attached to the body at the planarizing surface;
• mixing the polyethylene glycol into a non-abrasive solution comprising ammonia and water to form the lubricating planarizing solution prior to depositing the lubricating planarizing solution onto the polishing pad, the lubricating planarizing solution having a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the lubricating planarizing solution having polyvinyl alcohol as a viscosity-increasing lubricant additive, and the polishing pad having a body, a planarizing surface on the body, and abrasive particles fixedly attached to the body at the planarizing surface;
• mixing the polyvinyl alcohol into a non-abrasive solution comprising ammonia and water to form the lubricating planarizing solution prior to depositing the lubricating planarizing solution onto the polishing pad, the lubricating planarizing solution having a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the lubricating planarizing solution having CARBOPOL as a viscosity-increasing lubricant additive, and the polishing pad having a body, a planarizing surface on the body, and abrasive particles fixedly attached to the body at the planarizing surface;
• mixing the CARBOPOL into a non-abrasive solution comprising ammonia and water to form the lubricating planarizing solution prior to depositing the lubricating planarizing solution onto the polishing pad, the lubricating planarizing solution having a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a lubricating planarizing solution without abrasive particles onto a polishing pad, the lubricating planarizing solution having POLYOX as a viscosity-increasing lubricant additive, and the polishing pad having a body, a planarizing surface on the body, and abrasive particles fixedly attached to the body at the planarizing surface;
• mixing the POLYOX into a non-abrasive solution comprising ammonia and water to form the lubricating planarizing solution prior to depositing the lubricating planarizing solution onto the polishing pad, the lubricating planarizing solution having a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• pressing a front face of the substrate assembly against the non-abrasive solution and the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface;
• and
• inhibiting the fixed abrasive particles attached to the pad from aggressively abrading the front face and causing defects on the substrate assembly by adding polypropylene glycol to the non-abrasive solution comprised of ammonia and water to form a lubricating planarizing solution having a viscosity of at least approximately 4-20 cp.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• pressing a front face of the substrate assembly against the non-abrasive solution and the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface;
• and
• inhibiting the fixed abrasive particles attached to the pad from aggressively abrading the front face and causing defects on the substrate assembly by adding polyethylene glycol to the non-abrasive solution comprised of ammonia and water to form a lubricating planarizing solution having a viscosity of at least approximately 4-20 cp.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• pressing a front face of the substrate assembly against the non-abrasive solution and the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface;
• and
• inhibiting the fixed abrasive particles attached to the pad from aggressively abrading the front face and causing defects on the substrate assembly by adding polyvinyl alcohol to the non-abrasive solution comprised of ammonia and water to form a lubricating planarizing solution having a viscosity of at least approximately 4-100 cp.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• pressing a front face of the substrate assembly against the non-abrasive solution and the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface;
• and
• inhibiting the fixed abrasive particles attached to the pad from aggressively abrading the front face and causing defects on the substrate assembly by adding CARBOPOL to the non-abrasive solution comprised of ammonia and water to form a lubricating planarizing solution having a viscosity of at least approximately 4-100 cp.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad, the polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• pressing a front face of the substrate assembly against the non-abrasive solution and the planarizing surface;
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface;
• and
• inhibiting the fixed abrasive particles attached to the pad from aggressively abrading the front face and causing defects on the substrate assembly by adding POLYOX to the non-abrasive solution comprised of ammonia and water to form a lubricating planarizing solution having a viscosity of at least approximately 4-100 cp.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• adding polypropylene glycol to the non-abrasive solution to form a non-abrasive lubricating solution without abrasive particles, the non-abrasive lubricating planarizing solution being further comprised of ammonia and water mixed with the glycerol until the lubricating planarizing solution has a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• adding polyethylene glycol to the non-abrasive solution to form a non-abrasive lubricating solution without abrasive particles, the non-abrasive lubricating planarizing solution being further comprised of ammonia and water mixed with the polyethylene glycol until the lubricating planarizing solution has a viscosity of at least approximately 4-20 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• adding polyvinyl alcohol to the non-abrasive solution to form a non-abrasive lubricating solution without abrasive particles, the non-abrasive lubricating planarizing solution being further comprised of ammonia and water mixed with the polyvinyl alcohol until the lubricating planarizing solution has a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• adding CARBOPOL to the non-abrasive solution to form a non-abrasive lubricating solution without abrasive particles, the non-abrasive lubricating planarizing solution being further comprised of ammonia and water mixed with the CARBOPOL until the lubricating planarizing solution has a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.

A method of planarizing a microelectronic-device substrate assembly comprising:

• depositing a non-abrasive solution without abrasive particles onto a polishing pad having a body, a planarizing surface on the body, and a plurality of abrasive particles fixedly attached to the body at the planarizing surface;
• adding POLYOX to the non-abrasive solution to form a non-abrasive lubricating solution without abrasive particles, the non-abrasive lubricating planarizing solution being further comprised of ammonia and water mixed with the POLYOX until the lubricating planarizing solution has a viscosity of at least approximately 4-100 cp;
• pressing a front face of the substrate assembly against the planarizing solution on the planarizing surface;
• and
• moving at least one of the polishing pad or the substrate assembly with respect to the other to impart relative motion between the front face of the substrate assembly and the planarizing surface.