Methods for producing electron-emitting device, electron source, and image-forming apparatus
AssigneeCanon Kabushiki Kaisha
InventorTamayo Hiroki
Life of this patent
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Abstract
An electron-emitting device is provided with stable electron emission characteristics and with uniformity of electron emission. The present invention thus provides a method for producing an electron-emitting device having a pair of device electrodes opposed to each other and a thin film including an electron-emitting region, formed on a substrate, wherein a voltage is applied so that a potential of a front surface of the substrate becomes higher than a potential of the back surface thereof. On that occasion, the strength of the electric field is not more than 20 kV/cm between the front surface and the back surface of the substrate. The substrate is heated during the application of the voltage.
Claims68
A method for producing an electron-emitting device, said method comprising the steps of:
- a step of preparing a sodium-containing substrate having a first principal surface and a second principal surface opposed to each other;
- a step of forming an electroconductive film on the first principal surface;
- an electric field application step of applying an electric field to cause a potential of the first principal surface to become higher than a potential of the second principal surface, to cause at least one sodium ion existing in a side of the first principal surface to move to a side of the second principal surface, thereby reducing a concentration of sodium ions in the side of the first principal surface and minimizing an influence of sodium ions during an energization step of energizing said electroconductive film;
- and
- an energization step of energizing said electroconductive film after the electric field application step.
A method for producing an electron source substrate, said method comprising the steps of:
- a step of preparing a sodium-containing substrate having a first principal surface and a second principal surface opposed to each other;
- a step of forming a plurality of electroconductive films on the first principal surface;
- an electric field application step of applying an electric field to cause a potential of the first principal surface to become higher than a potential of the second principal surface, to cause at least one sodium ion existing in a side of the first principal surface to move to a side of the second principal surface, thereby reducing a concentration of sodium ions in the side of the first principal surface and minimizing an influence of sodium ions during an energization step of energizing said electroconductive film;
- and
- an energization step of energizing said plurality of electroconductive films after the electric field application step.
A method for producing an image-forming apparatus, said method comprising the steps of:
- a step of preparing a sodium-containing substrate having a first principal surface and a second principal surface;
- a step of placing a plurality of electroconductive films on the first principal surface;
- an electric field application step of applying an electric field to cause a potential of the first principal surface to become higher than a potential of the second principal surface, to cause at least one sodium ion existing in a side of the first principal surface upon which said plurality of electroconductive films are placed, to move to a side of the second principal surface, thereby reducing a concentration of sodium ions in the side of the first principal surface and minimizing an influence of sodium ions during an energization step of energizing said plurality of electroconductive films;
- an energization step of energizing said plurality of electroconductive films after the electric field application step;
- and
- a step of placing a substrate having an image-forming member opposite to the first principal surface on which said electroconductive films are placed.
A method for producing an electron-emitting device, comprising the steps of:
- (A) preparing a substrate having first and second principal surfaces opposed to each other, and comprising sodium;
- (B) forming a conductive film on the first principal surface;
- (C) setting the first principal surface to a higher potential than the second principal surface to cause at least one sodium ion existing in a side of the first principal surface to be moved to a side of the second principal surface, thereby reducing a concentration of sodium ions in the side of the first principal surface and minimizing an influence of sodium ions during an energizing of the conductive film;
- and
- (D) energizing the conductive film in a state while the at least one sodium ion moves to the side of the second principal surface.
Dependencies are inferred from the claim text.