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AssigneeKNF Neuberger GmbH
InventorsErich Becker, Heinz Riedlinger
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A process for evacuating a wet or liquid conveying medium out of the treatment chamber (2) of a treatment device (1) using a pumping device (3) that has a single or multi-stage suction pump (4) is provided, where the conveying medium is cooled off during the evacuation along the flow path such that the conveying medium in the pumping device (3) is in the liquid aggregate state or is converted into that state. A treatment device for carrying out the process as well as a single or multi-stage suction pump for this treatment device is also provided. In order to prevent a re-vaporization of the condensate or condensate film remaining in the suction pump (4), it is provided in the process and associated treatment device (1) that the cooling of the conveying medium is done at least in the area of at least one pump head (7) of the suction pump (4) and/or one connection channel connecting subsequent pump stages of the multi-stage suction pump to each other, and that at least one pump head (7) and/or the connection channel is cooled off below the vaporization temperature or boiling temperature present at the given evacuation pressure.
A process for evacuating a wet or liquid conveying medium from a treatment chamber (2) of a treatment device (1) using a pumping device (3) having a suction pump (4) with a pump head (7), wherein the conveying medium is cooled off during evacuation along a flow path such that the conveying medium in the pumping device (3) is in or converted to a liquid aggregate state, comprising cooling the conveying medium at least in an area of the pump head (7), such that the pump head (7) is cooled off below a vaporizing or boiling temperature of the conveying medium present at a given evacuation pressure.
A process for evacuating a wet or liquid conveying medium from a treatment chamber (2) of a treatment device (1) using a pumping device (3) having a multi-stage suction pump (4, 4′) and a connection channel (27) that connects together two pump stages of the multi-stage pump (4, 4′) which follow each other in a flow direction, wherein the conveying medium is cooled off during evacuation along a flow path such that the conveying medium in the pumping device (3) is in or converted to a liquid aggregate state, comprising cooling the conveying medium at least in an area of at least one of the connection channel (27) and a pump head (7) of the suction pump (4, 4′), such that the at least one pump head (7) and/or the connection channel (27) is cooled off below a vaporizing or boiling temperature of the conveying medium present at a given evacuation pressure.
A device for treatment of an article with a wet or liquid conveying medium, comprising a treatment chamber (2), a pumping device (3) connected to the chamber (2) for evacuation of the conveying medium therefrom, the pumping device (3) comprising a suction pump (4) with a pump head (7), and at least one cooling device (5) for cooling the pumping device (3) at least in a partial area such that the conveying medium in the pumping device (3) is in or converted to the liquid aggregate state, the at least one cooling device being provided for cooling the pump head (7), such that a temperature of the pump head (7) is cooled off below a vaporizing or boiling temperature present at a given evacuation pressure.
A device for treatment of an article with a wet or liquid conveying medium, comprising a treatment chamber (2), a pumping device (3) connected to the chamber (2) for evacuation of the conveying medium therefrom, the pumping device (3) comprising a multi-stage suction pump (4, 4′) and a connection channel (27) that connects together two pump stages of the multi-stage pump (4, 4′) which follow each other in a flow direction, each stage having a pump head (7), and at least one cooling device (5) for cooling the pumping device (3) at least in a partial area such that the conveying medium in the pumping device (3) is in or converted to the liquid aggregate state, the at least one cooling device being provided for cooling at least one of the pump heads (7) and/or the connection channel (27), such that a temperature of the at least one pump head (7) and/or an inner temperature of the connection channel (27) is cooled off below a vaporizing or boiling temperature present at at given evacuation pressure.
Dependencies are inferred from the claim text.