Thermopile detector and method for fabricating the same

A method for fabricating a thermopile detector, comprising:

• forming a diaphragm film on a substrate;
• forming thermocouples in a given region on the diaphragm film;
• forming a black body on the thermocouples, wherein the black body is formed of Ru, Ir, RuOx, or IrOx;
• and
• removing a portion of the substrate from a given region of a back-side of the substrate, to expose the diaphragm film.

A method for fabricating a thermopile detector, comprising:

• forming a diaphragm film on a substrate;
• forming thermocouples in a given region on the diaphragm film;
• forming a protection film on the thermocouples;
• forming a photoresist on the protection film and removing the photoresist from a given region;
• forming a black body on an entire surface including the photoresist and removing the remaining photoresist and the black body on the photoresist, wherein a ratio of injection of argon and oxygen in the forming the black body is O2/Ar=0.5˜0.7;
• and
• removing a portion of the substrate from a given region of a back-side of the substrate, to expose the diaphragm film.

A method for fabricating a thermopile detector, comprising:

• forming a diaphragm film on a substrate;
• forming thermocouples in a given region on the diaphragm film;
• forming a black body on the thermocouples by:
• forming a protection film on the diaphragm film,
• forming a photoresist on the protection film and removing the photoresist from a given region, and
• forming a black body on a top surface of the photoresist and the protection film and removing by lift-off the remaining photoresist and the portions of black body on the remaining photoresist, and
• removing a portion of the substrate from a given region of a back-side of the substrate, to expose the diaphragm film.