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US 6,305,315 B1Granted
ECR plasma apparatus
AssigneeShimadzu Corporation
InventorsMasayasu Suzuki, Satoko Ishii
Life of this patent
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Abstract
An ECR plasma apparatus is formed of a vacuum chamber, a cavity disposed at a side surface of the vacuum chamber to which microwave is introduced, an electromagnetic coil disposed around the cavity, and a case member made of a conductive material having the same electric potential as that of the cavity. The case member is disposed in the vacuum chamber adjacent the cavity to supplement resonance operation in the cavity. Thus, the cavity and the electromagnetic coil disposed therearound can be miniaturized and lightened in weight.
Claims6
An ECR plasma apparatus comprising:
- a vacuum chamber,
- a cavity disposed at a side of the vacuum chamber, microwave being introduced into said cavity,
- an electromagnetic coil disposed around the cavity, and
- a case member made of a conductive material having a same electric potential as that of the cavity and formed separately from a member for forming the cavity, said case member having a cylindrical shape and a diameter greater than a size of the cavity and being disposed in the vacuum chamber adjacent to the cavity to communicate therewith and spaced from an edge of the cavity to surround the cavity to supplement resonance operation in the cavity so that the cavity functioning as an ECR cavity resonance chamber can be miniaturized.
1 more element
Dependencies are inferred from the claim text.