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US 6,305,235 B1Granted
Variable height sensor tree
AssigneeAir Liquide America Corporation
InventorsJohn D. Geurian, David G. Cooper, Xuong P. Hong
Life of this patent
Estimating the term…
Abstract
A variable position sensing device is provided. The device includes a fixed track attached to a track holder. An adjustable sensor holder is adapted to receive a sensor and is capable of sliding and locking into position on the fixed track. The sensor device has particular applicability and the semiconductor manufacturing industry for setting sensors at different positions in a liquid chemical holding vessel.
Claims14
A variable position sensor device comprising:
- a fixed track attached to a track holder, and an adjustable sensor holder adapted to receive a sensor and capable of sliding and locking into position on said fixed track, said adjustable sensor holder includes a proximal end to said fixed vertical track, an upper portion and a distal end, wherein said proximal end is configured to slidingly fit into said fixed track, wherein said adjustable holder includes a thumb wheel locking member disposed on the upper portion of said adjustable holder to lock and unlock said holder at a desired position along the fixed track.
A variable position sensor device comprising:
- a holding vessel having a fixed track attached thereto, and an adjustable sensor holder adapted to receive a sensor, said adjustable sensor holder being capable of sliding and locking into position on said vertical track, wherein said adjustable sensor holder includes a proximal end to said fixed vertical track, an upper portion and a distal end, wherein said proximal end is configured to slidingly fit onto said fixed track, and wherein said adjustable holder includes a thumb wheel locking member disposed on the upper portion of the adjustable holder to lock and unlock the adjustable holder to a desired position along the fixed track.
Dependencies are inferred from the claim text.