Connector and probing system

A connection device for making electrical contact with electrodes arrayed on a device under test and exchanging electrical signals

• a support member;
• a plurality of pointed contact terminals arrayed in an area on a probing side of said support member;
• a multilayer film having a plurality of lead out wires electrically connected to said contact terminals and a ground layer enclosing an insulation layer facing said plurality of lead out wires;
• a clamping member installed on said multilayer film to eliminate slack therein;
• contact pressure means for making the tips of said contact terminals contact each of said electrodes on said device under test by applying contact pressure from the support member to the clamping member;
• a compliance mechanism to make the support member engage with the clamping member so that the tips of the contact terminals are arrayed in parallel with the electrodes on the device under test, to provide uniform pressure when the tips of the contact terminals make contact with the surface of the electrodes.

A connection device for making electrical contact with electrodes arrayed on a device under test and exchanging electrical signals comprising:

• a support member;
• plurality of pointed contact terminals arrayed in an area on a probing side of said support member;
• a multilayer film having a plurality of lead out wires electrically connected to said contact terminals and a ground layer enclosing an insulation layer facing said plurality of lead out wires,
• a frame clamped opposite the probing side of said multilayer film so as to enclose said area;
• a clamping member installed on said multilayer film to eliminate slack therein;
• contact pressure means for making the tips of said contact terminals contact each of said electrodes on said device under test by applying contact pressure from the support member to the clamping member;
• and
• a compliance mechanism to make the support member engage with the clamping member so that the tips of the contact terminals are arrayed in parallel with the electrodes on the device under test, to provide uniform pressure when the tips of the contact terminals make contact with the surface of the electrodes.

A test system with a connection device comprising:

• a support member with a material support system to support mounting of a device under test;
• a plurality of pointed contact terminals arrayed in an area on a probing side of said support member;
• a multilayer film having a plurality of lead out wires electrically connected to said contact terminals and a ground layer enclosing an insulation layer facing said plurality of lead out wires;
• a clamping member installed on said multilayer film to eliminate slack therein;
• and
• contact pressure means for making the tips of said contact terminals contact each of said electrodes on said device under test by applying contact pressure from said support member to said clamping member;
• a tester electrically connected to said lead out wires, which extent to the periphery of the multilayer film;
• positioning means to align electrodes arrayed on the device under test with the contact terminals arrayed on the multilayer film so that said electrodes will contact the contact terminals aligned by the positioning means and exchange electrical signals between the tester and the device under test to perform testing.

A test system with a connection device comprising:

• a support member with a material support system to support mounting of a device under test;
• a plurality of pointed contact terminals arrayed in an area on a probing side;
• a multilayer film having a plurality of lead out wires electrically connected at the periphery thereof to said contact terminals by anisotropic conductive sheet or solder material, and having a ground layer enclosing an insulation layer facing said plurality of lead out wires;
• a clamping member installed on said multilayer film to eliminate slack therein;
• and
• contact pressure means for making the tips of said contact terminals contact each of said electrodes on said device under test by applying contact pressure from said support member to said clamping member;
• a tester electrically connected with said lead out wires, which extend to the periphery of the multilayer film;
• and
• positioning means to align electrodes arrayed on the device under test with the contact terminals arrayed on the multilayer film, so that said electrodes will contact the contact terminals aligned by the positioning means and exchange electrical signals between the tester and the device under test to perform testing.

A test system with a connection device comprising:

• a support member with a material support system to support mounting of a device under test;
• plurality of pointed contact terminals arrayed in an area on a probing side of said support member;
• a multilayer film having a plurality of lead out wires electrically connected to said contact terminals and a ground layer enclosing an insulation layer facing said plurality of lead out wires;
• a clamping member installed on said multilayer film to eliminate slack therein;
• and
• contact pressure means for making the tips of said contact terminals contact each of said electrodes on said device under test by applying contact pressure from said support member to said clamping member;
• a tester electrically connected to said lead out wires, which extend to the periphery of the multilayer film;
• and
• positioning means to align electrodes arrayed on the device under test with the contact terminals arrayed on the multilayer film, so that said electrodes will contact the contact terminals aligned by the positioning means by raising or lowering the material support system to a desired height and exchange electrical signals between the tester and the device under test to perform testing.