Method and apparatus for imaging acoustic fields in high-frequency acoustic resonators
AssigneeAgere Systems Guardian Corp.
InventorsBradley Paul Barber, Peter Ledel Gammel, Rafael Nathan Kleiman, Hugo Fernando Safar
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Abstract
This invention relates to a method and apparatus for imaging acoustic fields in high-frequency acoustic resonators. More particularly, the invention is directed to a scanning RF mode microscope system that detects and monitors vibration of high frequency resonators that vibrate in the frequency range of approximately 1 MHz to 20 GHz. The system then maps with sub-Angstrom resolution vibration modes of such devices and obtains quantitative measurements of the piezoelectric properties of the materials.
Claims15
An apparatus comprising:
- a cantilever arm having a tip disposed at an end thereof, the tip being positioned to engage a surface of a specimen;
- a detecting system positioned to detect motion of the cantilever arm and produce detector signals based on the motion;
- a frequency generator producing a radio frequency signal to excite the specimen, the radio frequency signal having a first frequency that is amplitude modulated at a second frequency, the second frequency being less than the first frequency;
- a circuit operatively connected between the detecting system and the frequency generator to synchronize the detector signals with the second frequency;
- a first processing element operatively connected to the detecting system to convert the detector signals to first mapping data, the first mapping data relating to physical characteristics of the specimen;
- and,
- a second processing element operatively connected to the detecting system to convert the detector signals to second mapping data, the second mapping data relating to response characteristics of the specimen excited by the first frequency.
An apparatus for determining characteristics of a specimen, the apparatus comprising:
- a means for producing a radio frequency signal to excite the specimen, the radio frequency signal having a first frequency that is amplitude modulated at a second frequency, the second frequency being less than the first frequency;
- a means for generating response signals indicative of movement of the specimen in response to the radio frequency signal;
- a means for synchronizing the response signals with the second frequency;
- and,
- a means for converting the synchronized response signals to mapping data, the mapping data relating to response characteristics of the specimen excited by the first frequency.
A method for determining characteristics of a specimen, the method comprising steps of:
- producing a radio frequency signal to excite the specimen, the radio frequency signal having a first frequency that is amplitude modulated at a second frequency, the second frequency being less than the first frequency;
- generating response signals indicative of movement of the specimen in response to the radio frequency signal;
- converting the response signals to first mapping data, the first mapping data relating to physical characteristics of the specimen;
- synchronizing the response signals with the second frequency;
- and,
- converting the synchronized response signals to second mapping data, the second mapping data relating to response characteristics of the specimen excited by the first frequency.
Dependencies are inferred from the claim text.