Road vibration compensated angular rate sensor
AssigneeDelphi Technologies, Inc.
InventorsJack Daniel Johnson, Seyed Ramezan Zarabadi
Life of this patent
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AssigneeDelphi Technologies, Inc.
InventorsJack Daniel Johnson, Seyed Ramezan Zarabadi
Estimating the term…
A motion sensor (10) includes a micromachined sensing structure and a number of capacitive electrodes (20) disposed about a periphery thereof. The sensing structure includes a ring (14) supported above a substrate (12) so as to have an axis of rotation normal to the substrate (12), and a number of springs (16) attached to a post (18) positioned at the center of the ring (14). Certain diametrically opposed ones of the capacitive electrodes (20) are configured as drive electrodes (20a), and other diametrically opposed ones of the capacitive electrodes (20), positioned 90 degrees relative to the corresponding drive electrodes (20a) are configured as sense electrodes (20b). Signals produced at the opposed sense electrodes (20b) are conditioned and coupled to a common input of an amplifier circuit (64,70). With the configuration of the drive (20a) and sense (20b) electrodes and supporting circuitry (60-70), the resulting sensor (10) is operable to reject the effects of linear forces thereupon due to road vibrational effects.
A motion sensor comprising:
A motion sensor comprising:
A method of minimizing road vibrational effects in a motion sensor having a sensing ring supported by a substrate and a number of electrode structures defined on said substrate about said ring, the method comprising the steps of:
Dependencies are inferred from the claim text.