Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof

A preventive maintenance method for a backing-film of a CMP machine, comprising the steps of:

• (a) providing the CMP machine having a shaft and a detachable top-ring disposed on the shaft, wherein the top-ring is provided with plural air holes, a detachable guide-ring, and a replaceable backing-film, and wherein the backing-film is pre-drilled by laser to produce plural through holes that corresponds to the air holes;
• (b) disassembling the top-ring from the shaft before the preventive maintenance for the backing-film is proceeded;
• (c) cleaning the top-ring after disassembling the guide-ring from the top-ring and removing the used backing-film.;
• (d) providing an aligning panel having plural first pins and plural first pinholes at layout positions corresponding to the air holes of the top-ring, wherein each of the first pins are disposed inside each of the corresponding first pinholes respectively;
• (e) aligning a new backing-film with the aligning panel and then inserting each of the first pins through each of the corresponding through holes of the backing-film;
• (f) putting the new backing-film on the top-ring along with the aligning panel and inserting each of the first pins through each of the corresponding air holes;
• (g) adhering the new backing-film onto the top-ring and then removing the aligning panel;
• and
• (h) assembling the top-ring to the shaft after assembling the guide-ring to the top-ring.