Method for controlling semiconductor equipment interlocked with a host computer

A method for controlling semiconductor fabrication equipment, comprising:

• reporting, to a host computer connected to a fabrication equipment, process condition data indicative of a process being performed on a unit lot of product in said fabrication equipment;
• determining whether or not said reported process condition data are in a range of optimal process conditions for said process as registered in a data base of said host computer;
• if it is determined that said reported process condition data are in said range of optimal process conditions, determining whether or not said reported process condition data satisfy a specific rule registered in said host computer;
• if it is determined that said reported process condition data are not in said range of optimal process conditions, holding and analyzing said unit lot of product processed through said process and taking appropriate action based on the analysis;
• if it is determined that said reported process condition data satisfy said specific rule, allowing said unit lot of product to proceed to a subsequent process;
• if it is determined that said reported process condition data do not satisfy said specific rule, simultaneously interlocking said fabrication equipment and a tracking module of said host computer, automatically saving information on said interlocking in said host computer, and stopping said process until a cause of process failure is determined and removed;
• and
• repeatedly performing the method until fabrication of said unit lot of product is completed.