Substrate transfer robot
AssigneeJel Corporation
InventorToshihiko Mitsuyoshi
Life of this patent
Estimating the term…
Abstract
A substrate transfer robot has arms 10, 20, 28 to be arranged in high-temperature vacuum atmosphere. To effectively cool the arms, a cooling block 30 having a cooling line P formed therein for circulating coolant is fixed to a first arm 10, as one of the arms 10, 20, 28 which are accommodated in a transfer chamber 2 of which inside is in a vacuum atmosphere. A driving shaft 11 for driving the first arm 10 is provided with a feed passage 13A and a return passage 13B formed along the axial direction thereof for supplying and collecting the coolant to and from the cooling line P of the cooling block 30. A swivel joint 40 is provided on the lower end of the driving shaft to allow the connection between the passage to an external cooling circulating means 8 even when the driving shaft 11 is rotated.
Claims11
A substrate transfer robot to be connected to an external coolant circulatory unit, comprising:
- first and second arms connected to each other to transfer a substrate and accommodated in a transfer chamber,
- a cooling block fixed to the first arm and having a cooling passage for circulating coolant therein,
- a heat absorbing flange integrally formed with the cooling block and contacting a part of the second arm connected to the first arm at one end thereof,
- a driving shaft connected to the first arm for driving the same, said driving shaft having a feed passage and a return passage therein extending along an axial direction thereof and communicating with the cooling block for supplying and collecting the coolant to and from the cooling block, and
- a rotary joint attached to a lower end of the driving shaft to communicate with the feed and return passages, said rotary joint being adapted to be connected to the external coolant circulatory unit for providing the coolant to the cooling block and receiving the coolant from the cooling block when the driving shaft is being rotated.
A substrate transfer robot to be connected to an external coolant circulatory unit, comprising:
- first and second arms connected to each other to transfer a substrate and accommodated in a transfer chamber,
- a cooling block fixed to a stationary portion of the transfer chamber, said cooling block being attached to the first arm and having a cooling passage for circulating coolant therein,
- a heat absorbing flange integrally formed with the cooling block and contacting a part of the second arm connected to the first arm at one end thereof, and
- a feed passage and a return passage connected to the cooling block for supplying and receiving the coolant between the cooling block and the external coolant circulatory unit.
Dependencies are inferred from the claim text.