# US 6,298,080 B1 · Narrow band excimer or molecular fluorine laser with adjustable bandwidth

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 6,298,080 B1
- Document ID: US6298080B1
- Status: Granted
- Kind: B1
- Application number: 09/452,353
- Filed: 1999-12-01
- Granted: 2001-10-02
- Earliest claimed: 1999-03-12
- Assignees: Lambda Physik AG
- Inventors: Peter Heist; Jürgen Kleinschmidt
- Web page: https://patentgrep.com/patent/US6298080B1

## CPC

- G03F 7/70025: {by lasers}
- H01S 3/1392: {by using a passive reference, e.g. absorption cell (H01S3/1396, H01S3/1398 take precedence)}
- H01S 3/08036: using intracavity dispersive, polarising or birefringent elements
- H01S 3/08059: {Constructional details of the reflector, e.g. shape (mirrors in general G02B5/08; mountings for mirrors G02B7/18)}
- H01S 3/105: by controlling the mutual position or the reflecting properties of the reflectors of the cavity {, e.g. by controlling the cavity length}({H01S3/10076}, H01S3/13 take precedence)
- H01S 3/225: comprising an excimer or exciplex
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL

## Abstract

A line-narrowed excimer or molecular fluorine laser system includes a gain medium surrounded by a resonator for generating a laser beam, a discharge circuit including a plurality of electrodes for energizing the gain medium and a line-narrowing unit within the resonator for narrowing the bandwidth of the laser system. The resonator includes a deformable resonator reflector. A technique for adjusting the bandwidth of the laser system includes adjusting a surface contour of the deformable resonator reflector. A desired bandwidth may be selected manually or using a processor which automatically controls the surface contour adjustment.

## Claims

### Claim 1

A line-narrowed excimer or molecular fluorine laser system, comprising:
a gain medium;
a resonator surrounding the gain medium for generating a laser beam, said resonator including a deformable non-dispersive resonator reflector;
a discharge circuit including a plurality of electrodes for energizing the gain medium; and
a line-narrowing unit within the resonator for narrowing the bandwidth of the laser system.

### Claim 2 (depends on 1)

The laser system of claim 1, wherein said deformable resonator reflector is a cylindrical mirror.

### Claim 3 (depends on 1)

The laser system of claim 1, wherein said deformable resonator reflector is a spherical mirror.

### Claim 4 (depends on 1, 2, 3)

The laser system of any of claims 1-3, wherein said deformable resonator reflector is a highly reflective mirror.

### Claim 5 (depends on 1)

The laser system of claim 1, wherein said deformable resonator reflector is an output coupler.

### Claim 6 (depends on 1)

The laser system of claim 1, wherein said line-narrowing unit is separate from said deformable resonator reflector.