# US 6,297,493 B1 · Photoelectric converter with a plurality of photoelectric conversion layers deposited in a predetermined orientation relative to one another

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- Number: US 6,297,493 B1
- Document ID: US6297493B1
- Status: Granted
- Kind: B1
- Application number: 09/310,122
- Filed: 1999-05-12
- Granted: 2001-10-02
- Earliest claimed: 1995-09-05
- Assignees: Canon Kabushiki Kaisha
- Inventors: Isao Kobayashi; Noriyuki Kaifu; Shinichi Takeda; Kazuaki Tashiro; Tadao Endo; Toshio Kameshima
- Web page: https://patentgrep.com/patent/US6297493B1

## CPC

- H04N 25/41: {Extracting pixel data from a plurality of image sensors simultaneously picking up an image, e.g. for increasing the field of view by combining the outputs of a plurality of sensors}
- H04N 23/30: for generating image signals from X-rays
- H10F 39/107: {having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays}
- H10F 39/18: Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F 39/1892: {Direct radiation image sensors}
- H10F 39/1898: {Indirect radiation image sensors, e.g. using luminescent members}
- H10F 39/195: {X-ray, gamma-ray or corpuscular radiation imagers}
- H10F 39/802: {Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes}
- H10F 39/803: {Pixels having integrated switching, control, storage or amplification elements}
- H10F 39/189: {X-ray, gamma-ray or corpuscular radiation imagers}
- H10F 39/805: {Coatings}
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

A photoelectric converter includes a plurality of substrates, which are located adjacent to each other and on which a plurality of photoelectric conversion devices are two-dimensionally arranged, either scan circuits or detection circuits, at least, that are arranged on two opposing sides of the photoelectric converter, whereby scanning directions either from the scan circuits or from the detection circuits, which are arranged on the two opposing sides, are capable of being set so as to be performed in like directions.

## Claims

### Claim 1

A method of manufacturing a photoelectric converter formed by arranging and bonding together a plurality of substrates each including a plurality of photoelectric conversion devices in two-dimensional array, so that photoelectric conversion device sections thereof abut each other side by side on a plane, comprising steps of:
arranging the plurality of substrates on a plane on a surface of a common jig within a common CVD apparatus, and depositing on each of the substrates, a semiconductor layer for use in forming the photoelectric conversion device sections; and
bonding on a mother board the plurality of substrates on which the semiconductor layer is deposited, such that said plurality of substrates are respectively deposited in a same orientation as an orientation of the substrates arranged at the deposition step.

### Claim 2 (depends on 1)

A method according to claim 1, wherein the semiconductor layer for use in forming the photoelectric conversion device is an amorphous semiconductor layer.

### Claim 3 (depends on 1)

A method according to claim 1, wherein
the photoelectric conversion device sections on which the plurality of photoelectric conversion devices are arranged on the plane leaning toward two abutting sides of the substrates are formed, and a scanning circuit and a detection circuit connected to the photoelectric conversion device sections are formed leaning toward another two abutting sides of the substrates; and
the plurality of substrates are respectively bonded together such that at least one of the abutting sets of two sides toward which the photoelectric conversion device sections are formed to abut each other.

### Claim 4 (depends on 1)

A method according to claim 1, wherein a photoelectric converter is formed on the photoelectric conversion device.

### Claim 5 (depends on 1)

A method according to claim 1, wherein a phosphor is formed on the photoelectric conversion device.