# US 6,297,131 B1 · Semiconductor device manufacturing method for grinding and dicing a wafer from a back side of the wafer

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- Number: US 6,297,131 B1
- Document ID: US6297131B1
- Status: Granted
- Kind: B1
- Application number: 09/357,657
- Filed: 1999-07-20
- Granted: 2001-10-02
- Earliest claimed: 1999-04-22
- Assignees: Fujitsu Limited
- Inventors: Yutaka Yamada; Takanori Muramoto
- Web page: https://patentgrep.com/patent/US6297131B1

## CPC

- H10P 72/74: {using temporarily an auxiliary support}
- H10P 54/00: Cutting or separating of wafers, substrates or parts of devices
- H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes}
- H10P 72/7414: {the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support}
- H10P 72/7416: {used during dicing or grinding}
- H10P 72/7422: {used to protect an active side of a device or wafer}
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A yield rate and a throughput of a semiconductor device can be increased when a large-diameter wafer having a reduced thickness is used. The semiconductor device is produced by using a wafer having a front surface on which circuits are formed and a back surface opposite to the front surface. A protective tape is applied to the front surface of the wafer. The wafer is mounted to a dicing tape via the protective tape, the dicing tape being spread on a wafer frame having a size larger than a diameter of the wafer. The back surface of the wafer is ground while the wafer is mounted on the dicing tape. The wafer is diced, after the wafer is ground, while the wafer is mounted on the dicing tape so as to form the semiconductor device by full-dicing.

## Claims

### Claim 1

A method of manufacturing a semiconductor device including a wafer having a front surface on which circuits are formed and a back surface opposite to the front surface, comprising the steps of:
applying a protective tape to the front surface of said wafer;
mounting said wafer to a dicing tape via said protective tape, said dicing tape being spread on a wafer frame having a size larger than a diameter of said wafer;
grinding the back surface of said wafer while said wafer is mounted on said dicing tape; and
dicing said wafer, after the step of grinding is completed, while said wafer is mounted on said dicing tape.

### Claim 2 (depends on 1)

The method as claimed in claim 1, wherein said protective tape is applied to said wafer by ultraviolet-cure adhesive, and said manufacturing method further comprises the step of projecting an ultraviolet beam onto said ultraviolet-cure adhesive after completion of the step of dicing.

### Claim 3 (depends on 1)

The method as claimed in claim 1, wherein the step of dicing includes the steps of:
projecting an infrared beam onto said wafer from a side of the back surface of said wafer so as to detect reflection of the infrared beam; and
recognizing a scribe line based on the reflection of the infrared beam so that the dicing is performed by referring to the recognized scribe line.

### Claim 4 (depends on 1)

The method as claimed in claim 1, wherein the step of grinding includes the step of fixing said wafer frame on a vacuum chuck table having a size larger than said wafer frame.

### Claim 5 (depends on 1)

The method as claimed in claim 1, further comprising the step of removing said semiconductor device from said protective tape, after the step of dicing is completed, by pushing said semiconductor device via said dicing tape while holding said semiconductor device by a vacuum pickup tool.

### Claim 6 (depends on 1)

The method as claimed in claim 1, wherein said semiconductor device is formed by full-dicing in the step of dicing.

### Claim 7 (depends on 2)

The method as claimed in claim 2, wherein said ultraviolet-cure adhesive is ultraviolet-cure pressure-sensitive adhesive.