# US 6,296,226 B1 · Fluid metering system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,296,226 B1 - Document ID: US6296226B1 - Status: Granted - Kind: B1 - Application number: 09/692,562 - Filed: 2000-10-19 - Granted: 2001-10-02 - Earliest claimed: 2000-10-19 - Assignees: SpeedFam-IPEC Corporation - Inventors: Gregory A. Olsen - Web page: https://patentgrep.com/patent/US6296226B1 ## CPC - F17D 1/04: for distribution of gas - G05D 7/0641: {using a plurality of throttling means (G05D7/067 takes precedence)} - F17D: PIPE-LINE SYSTEMS; PIPE-LINES (pumps or compressors F04; fluid dynamics F15D; valves or the like F16K; pipes, laying pipes, supports, joints, branches, repairing, work on the entire line, accessories F16L; steam traps or the like F16T; fluid-pressure electric cables H01B9/06) - G05D: SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES ## Abstract A fluid metering apparatus includes a gas inlet, a first regulator in fluid communication with the gas inlet and configured to emit the gas at a first gas pressure, and a second regulator in fluid communication with the gas inlet and configured to emit the gas at a second gas pressure. A first valve is in fluid communication with the first regulator and a second valve is in fluid communication with the second regulator. A switch mechanism has two actuators which, when separately actuated, causes either the first valve to be open and the second valve to be closed or the first valve to be closed and the second valve to be open. The apparatus further includes a fluid pressure regulating device having a fluid inlet port which receives a fluid at a fluid inlet pressure, a gas inlet port and a fluid outlet port. The fluid pressure regulating device delivers the fluid to the fluid outlet port at a device outlet flow rate which is proportional to a predetermined ratio of the fluid inlet pressure and either the first gas pressure if the first actuator is actuated or the second gas pressure if the second actuator is actuated. The apparatus further includes a fluid outlet and an orifice fitting in fluid communication with the fluid outlet port and configured to effect a pressure drop between the fluid outlet port and the fluid outlet. ## Claims ### Claim 1 A fluid metering apparatus for the delivery of a fluid at a desired flow rate, said apparatus comprising: (a) a gas inlet for receiving a gas; (b) a first regulator in fluid communication with said gas inlet and configured to receive said gas from said gas inlet and emit said gas at a first gas pressure; (c) a second regulator in fluid communication with said gas inlet and configured to receive said gas from said gas inlet and emit said gas at a second gas pressure; (d) a first valve in fluid communication with said first regulator; (e) a second valve in fluid communication with said second regulator; (f) a switch mechanism connected to said first valve and said second valve and having a first actuator and a second actuator, wherein said switch mechanism causes said first valve to be open and said second valve to be closed when said first actuator is actuated and causes said second valve to be open and said first valve to be closed when said second actuator is actuated; (g) a fluid pressure regulating device having: i. a fluid inlet port configured to receive a fluid to be metered, wherein said fluid has a fluid inlet pressure; ii. a gas inlet port in fluid communication with said first valve and said second valve; and iii. a fluid outlet port, wherein, when said first actuator of said switch mechanism is actuated, said fluid pressure regulating device is configured to deliver said fluid to said fluid outlet port at a first device outlet flow rate which is proportional to a predetermined ratio of said fluid inlet pressure and said first gas pressure and wherein, when said second actuator of said switch mechanism is actuated, said fluid pressure regulating device is configured to deliver said fluid to said fluid outlet port at a second device outlet flow rate which is proportional to a predetermined ratio of said fluid inlet pressure and said second gas pressure; (h) a fluid outlet; and (i) an orifice fitting in fluid communication with said fluid outlet port and configured to effect a pressure drop between said fluid outlet port and said fluid outlet. ### Claim 2 (depends on 1) The apparatus of claim 1 further comprising a fluid flow activation device which is configured to permit said fluid to flow from said fluid inlet port to said fluid outlet port when one of said first actuator and said second actuator is actuated. ### Claim 3 (depends on 2) The apparatus of claim 2 wherein said fluid flow activation device comprises an activation valve in fluid communication with said gas inlet and said fluid pressure regulating device and wherein said activation valve is opened when one of said first actuator and said second actuator is actuated. ### Claim 4 (depends on 3) The apparatus of claim 3 wherein said switch mechanism comprises an electronic assembly which is configured to transmit a first electronic signal to said first valve when said first actuator is actuated and to transmit a second electronic signal to said second valve when said second actuator is actuated. ### Claim 5 (depends on 4) The apparatus of claim 4 wherein said electronic assembly transmits said first electronic signal to said activation valve when said first actuator is actuated and said second electronic signal to said activation valve when said second actuator is actuated. ### Claim 6 (depends on 3) The apparatus of claim 3 wherein said activation valve comprises an internal valve of a solenoid valve. ### Claim 7 (depends on 1) The apparatus of claim 1 wherein said switch mechanism comprises an electronic assembly which is configured to transmit a first electronic signal to said first valve when said first actuator is actuated and to transmit a second electronic signal to said second valve when said second actuator is actuated. ### Claim 8 (depends on 1) The apparatus of claim 1 wherein said first valve comprises an internal valve of a solenoid valve. ### Claim 9 (depends on 1) The apparatus of claim 1 wherein said second valve comprises an internal valve of a solenoid valve. ### Claim 10 (depends on 1) The apparatus of claim 1 wherein said first regulator is adjustable so that said first gas pressure may be adjusted to a desired pressure. ### Claim 11 (depends on 1) The apparatus of claim 1 wherein said second regulator is adjustable so that said second gas pressure may be adjusted to a desired pressure. ### Claim 12 A fluid metering apparatus for the delivery of a fluid at a desired flow rate, said apparatus comprising: (a) a gas inlet; (b) a first regulator in fluid communication with said gas inlet and configured to receive a gas from said gas inlet and emit said gas from a first regulator gas outlet at a first gas pressure; (c) a second regulator in fluid communication with said first regulator gas outlet and configured to receive said gas from said first regulator gas outlet and emit said gas at a second gas pressure, wherein said first gas pressure is higher than said second gas pressure; (d) a first valve in fluid communication with said first regulator; (e) a second valve in fluid communication with said second regulator; (f) a switch mechanism connected to said first valve and said second valve and having a first actuator and a second actuator, wherein said switch mechanism causes said first valve to be open and said second valve to be closed when said first actuator is actuated and causes said second valve to be open and said first valve to be closed when said second actuator is actuated; (g) a fluid pressure regulating device having: i. a fluid inlet port configured to receive a fluid to be metered, wherein said fluid has a fluid inlet pressure; ii. a gas inlet port in fluid communication with said first valve and said second valve; and iii. a fluid outlet port, wherein when said first actuator of said switch mechanism is actuated, said fluid pressure regulating device is configured to deliver said fluid to said fluid outlet port at a first device outlet flow rate which is proportional to a predetermined ratio of said fluid inlet pressure and said first gas pressure and wherein, when said second actuator of said switch mechanism is activated, said fluid pressure regulating device is configured to deliver said fluid to said fluid outlet port at a second device outlet flow rate which is proportional to a predetermined ratio of said fluid inlet pressure and said second gas pressure; (h) a fluid outlet; and (i) an orifice fitting in fluid communication with said fluid outlet port and configured to effect a pressure drop between said fluid outlet port and said fluid outlet. ### Claim 13 (depends on 12) The apparatus of claim 12 further comprising a fluid activation device which is configured to permit said fluid to flow from said fluid inlet port to said fluid outlet port when one of said first actuator and said second actuator is actuated. ### Claim 14 (depends on 13) The apparatus of claim 13 wherein said fluid activation device comprises an activation valve in fluid communication with said gas inlet and said fluid pressure regulating device and wherein said activation valve is opened when one of said first actuator and said second actuator is actuated. ### Claim 15 (depends on 14) The apparatus of claim 14 wherein said switch mechanism comprises an electronic assembly which is configured to transmit a first electronic signal to said first valve when said first actuator is actuated and to transmit a second electronic signal to said second valve when said second actuator is actuated. ### Claim 16 (depends on 15) The apparatus of claim 15 wherein said electronic assembly transmits said first electronic signal to said activation valve when said first actuator is actuated and said second electronic signal to said activation valve when said second actuator is activated. ### Claim 17 The apparatus of 14 wherein said activation valve comprises an internal valve of a solenoid valve. ### Claim 18 (depends on 12) The apparatus of claim 12 wherein said switch mechanism comprises an electronic assembly which is configured to transmit a first electronic signal to said first valve when said first actuator is actuated and to transmit a second electronic signal to said second valve when said second actuator is actuated. ### Claim 19 (depends on 12) The apparatus of claims 12 wherein said first valve comprises an internal valve of a solenoid valve. ### Claim 20 (depends on 12) The apparatus of claim 12 wherein said second valve comprises an internal valve of a solenoid valve. ### Claim 21 (depends on 12) The apparatus of claim 12 wherein said first regulator is adjustable so that said first gas pressure may be adjusted to a desired pressure. ### Claim 22 (depends on 12) The apparatus of claim 12 wherein said second regulator is adjustable so that said second gas pressure may be adjusted to a desired pressure. ### Claim 23 A fluid metering apparatus for the delivery of a fluid at an Ni delivery flow rate, wherein N is any integer greater than 1 and i is any integer from 1 to N, said apparatus comprising: (a) a gas inlet for receiving a gas; (b) N regulators, wherein each said Ni regulator is in fluid communication with said gas inlet and is configured to emit said gas at a corresponding Ni gas pressure; (c) N valves wherein each Ni valve is in fluid communication with a corresponding Ni regulator; (d) a switch mechanism connected to each valve and having N actuators, wherein said switch mechanism opens an Ni valve and closes the remaining valves when a corresponding Ni actuator is actuated; (e) a fluid pressure regulating device having: (i) a fluid inlet port configured to receive a fluid to be metered, wherein said fluid has a fluid inlet pressure; (ii) a gas inlet port in fluid communication with each valve; and (iii) a fluid outlet port, wherein, when an Ni actuator of said switch mechanism is actuated, said fluid pressure regulating device is configured to deliver said fluid to said fluid outlet port at a device outlet flow rate which is proportional to a predetermined ratio of said fluid inlet pressure and an Ni gas pressure, which Ni gas pressure corresponds to an Ni actuator; (f) a fluid outlet configured to emit said fluid at an Ni delivery flow rate; and (g) an orifice fitting in fluid communication with said fluid outlet port and configured to effect a pressure drop between said fluid outlet port and said fluid outlet. ### Claim 24 (depends on 23) The apparatus of claim 23 further comprising a fluid activation device which is configured to permit said fluid to flow from said fluid inlet port to said fluid outlet port when an Ni actuator is actuated. ### Claim 25 (depends on 24) The apparatus of claim 24 wherein said fluid activation device comprises an activation valve in fluid communication with said gas inlet and said fluid pressure regulating device and wherein activation valve is opened when an Ni actuator is actuated. ### Claim 26 (depends on 25) The apparatus of claim 25 wherein said switch mechanism comprises an electronic assembly which is configured to transmit an Ni electronic signal to a corresponding Ni valve when a corresponding Ni actuator is actuated. ### Claim 27 (depends on 26) The apparatus of claim 26 wherein said electronic assembly transmits an Ni electronic signal to said activation valve when a corresponding Ni actuator is actuated. ### Claim 28 (depends on 23) The apparatus of claim 23 wherein said switch mechanism comprises an electronic assembly which is configured to transmit an Ni electronic signal to a corresponding Ni valve when a corresponding Ni actuator is actuated.