Method and device for simultaneously cutting off a multiplicity of wafers from a workpiece
AssigneesWacker Chemie AG, Wacker Siltronic Gesellschaft fur Halbleitermaterialien AG
InventorsBert Ripper, Christian Andrae, Karl Egglhuber, Holger Lundt, Helmut Kölker, Jochen Greim
Life of this patent
Estimating the term…