Manufacturing process change control apparatus and manufacturing process change control method

A manufacturing process change control method based on information from a manufacturing process, said method comprising:

• recording a plurality of change items for each of which a manufacturing process change control is to be performed, information required for a judgment, and a judgment method;
• extracting required information before and after a change point for each one of said stored change items from said manufacturing process and storing said extracted information in a memory means;
• performing a statistical comparison judgment of said extracted information before and after said change point for each change item;
• and
• outputting a result of said comparison judgment,
• wherein said recording comprises recording a process sequence maintenance history, a process conditions maintenance history, an equipment maintenance history, and a material lot change history, and
• wherein a plurality of predetermined data items are selected for recording comprising the maintenance histories of selected manufacturing parameters, the change date and time, the compared process data name, the test method, the number of tests, and the test time of each item being stored.

A manufacturing process change control apparatus, said apparatus comprising:

• a recorder for recording a plurality of change items for which a process change is to be performed, information required from a manufacturing process for making a comparison judgment, and a comparison method;
• an information extracting and storing device for extracting and storing said required information from a period before said process change and from a period after said process change;
• a comparison judgment controller for performing a statistical comparison judgment of said required information obtained from said period before and from said period after said process change for each of said plurality of change items and extracted by said information extracting and storing device;
• and
• an output device for outputting a judgment result of said comparison judgment controller,
• wherein said recorder records a process sequence maintenance history, a process conditions maintenance history, an equipment maintenance history, and a material lot change history, and
• wherein a plurality of predetermined data items are selected for recording comprising the maintenance histories of selected manufacturing parameters, the change date and time, the compared process data name, the test method, the number of tests, and the test time of each item being stored.