# US 6,295,153 B1 · Digital optical chemistry micromirror imager

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- Number: US 6,295,153 B1
- Document ID: US6295153B1
- Status: Granted
- Kind: B1
- Application number: 09/326,526
- Filed: 1999-06-04
- Granted: 2001-09-25
- Earliest claimed: 1998-06-04
- Assignees: Board of Regents, The University of Texas System
- Inventors: Harold R. Garner
- Web page: https://patentgrep.com/patent/US6295153B1

## CPC

- G03F 7/70375: {Multiphoton lithography or multiphoton photopolymerization; Imaging systems comprising means for converting one type of radiation into another type of radiation}
- B01J 19/0046: {Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays (synthesis methods per se C40B50/00)}
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- G02B 26/0833: {the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B)}
- G03F 7/2002: {with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image}
- G03F 7/2053: {using a laser (ablative removal B41C)}
- G03F 7/70291: {Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices}
- B01J 2219/00439: using micromirror arrays
- B01J 2219/00527: Sheets
- B01J 2219/00529: DNA chips
- B01J 2219/00576: fluorophore
- B01J 2219/00585: Parallel processes
- B01J 2219/0059: Sequential processes
- B01J 2219/00596: Solid-phase processes
- B01J 2219/00605: the compounds being directly bound or immobilised to solid supports
- B01J 2219/00608: DNA chips
- B01J 2219/00612: the surface being inorganic
- B01J 2219/00617: by chemical means
- B01J 2219/00626: Covalent
- B01J 2219/00637: by coating it with another layer
- B01J 2219/00659: Two-dimensional arrays
- B01J 2219/00675: In-situ synthesis on the substrate
- B01J 2219/00689: using computers
- B01J 2219/00704: integrated with the reactor apparatus
- B01J 2219/00711: Light-directed synthesis
- B01J 2219/00722: Nucleotides
- C40B 40/06: Libraries containing nucleotides or polynucleotides, or derivatives thereof
- G01J 2003/1278: {Mask with spectral selection}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- C40B: COMBINATORIAL CHEMISTRY; LIBRARIES, e.g. CHEMICAL LIBRARIES (in silico combinatorial libraries of nucleic acids, proteins or peptides G16B35/00; in silico combinatorial chemistry G16C20/60)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)

## Abstract

An apparatus and method for catalyzing a reaction on a substrate (24) comprising, a light source (12), a micromirror (16) positioned to redirect light (14) from the light source (12) toward a substrate (24) wherein the redirected light (14) catalyzes a chemical reaction proximate a substrate (24), is disclosed. A computer (18) is connected to, and controls, the positioning of mirrors within the micromirror (16) to specifically redirect light to specific portions of a substrate. The substrate (24) can be placed in a reaction chamber (50), wherein the light (14) that is redirected by the micromirror (16) catalyzes a chemical reaction proximate a substrate (24).

## Claims

### Claim 1

An apparatus for catalyzing a reaction on a substrate comprising:
a light source;
a micromirror positioned to redirect light from said light source toward said substrate;
a diffusion lens between said light source and said micromirror;
a computer connected to, and controlling, said micromirror, and
a reaction chamber is placed in the path of light redirected by said micromirror, wherein light that is redirected by said micromirror catalyzes a chemical reaction proximate said substrate in said reaction chamber.

### Claim 2 (depends on 1)

The apparatus of claim 1 wherein said light interacts with a novolak resin proximate said substrate to produce a photoresist pattern.

### Claim 3 (depends on 1)

The apparatus of claim 1 further comprising:
a reaction chamber disposed about said substrate;
one or more reactant lines connected to said reaction chamber;
one or more reaction chemicals connected to said reactant lines; and
a computer connected to, and controlling, the supply of said one or more reaction chemicals to said reaction chamber via said reactant lines.

### Claim 4 (depends on 3)

The apparatus of claim 3 wherein said one or more of said reaction chemicals is involved in a chemical reaction when exposed to light.

### Claim 5

An apparatus for catalyzing a reaction on a substrate comprising:
a light source;
a micromirror positioned to redirect light from said light source toward said substrate;
a diffusion lens between said light source and said micromirror;
a reaction chamber disposed about said substrate;
one or more reactant lines connected to said reaction chamber;
one or more reaction chemicals connected to said reactant lines; and
a computer connected to, and controlling, said micromirror and the supply of said one or more reaction chemicals to said reaction chamber via said reactant lines, wherein a light catalyzable reaction occurs proximate to the site where light produced by said light source and redirected by said micromirror strikes said substrate.

### Claim 6 (depends on 5)

The apparatus of claim 5 wherein said light source is a UV light.

### Claim 7 (depends on 5)

The apparatus of claim 5 wherein said light source is a xenon lamp, or a mercury lamp, or a laser or a combination thereof.

### Claim 8 (depends on 5)

The apparatus of claim 5 further a lens system comprising:
a diffusion lens between said light source and said micromirror; and
a lens between said micromirror and said substrate.

### Claim 9 (depends on 5)

The apparatus of claim 5 wherein said micromirror is further defined as a micromirror array.

### Claim 10 (depends on 5)

The apparatus of claim 5 wherein said light interacts with a novolak resin proximate said substrate to produce a photoresist pattern.

### Claim 11 (depends on 5)

The apparatus of claim 5 wherein said light catalyzes the synthesis of a nucleotide base proximate said substrate.

### Claim 12 (depends on 5)

The apparatus of claim 5 wherein said light catalyzes the synthesis of an amino acid residue proximate said substrate.

### Claim 13 (depends on 5)

The apparatus of claim 5 wherein said light catalyzes a reaction involving a molecule proximate said substrate.

### Claim 14 (depends on 5)

The apparatus of claim 5 wherein said light crosslinks a molecule proximate said substrate.

### Claim 15 (depends on 5)

The apparatus of claim 5 further comprising a total internal reflection mirror disposed in a position to redirect light from said light source into said micromirror and from said micromirror array toward said substrate.

### Claim 16 (depends on 5)

The apparatus of claim 5 wherein said substrate is mounted on a movable platform that can be controlled via a computer to allow for multiple repetitive exposures of said substrate to light reflected by said micromirror.