# US 6,294,218 B1 · Process for coating a substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 6,294,218 B1 - Document ID: US6294218B1 - Status: Granted - Kind: B1 - Application number: 09/339,898 - Filed: 1999-06-25 - Granted: 2001-09-25 - Earliest claimed: 1998-06-27 - Assignees: Micronas GmbH - Inventors: Günter Igel; Joachim Krumrey - Web page: https://patentgrep.com/patent/US6294218B1 ## CPC - C23C 14/5806: {Thermal treatment} - C23C 14/024: {Deposition of sublayers, e.g. to promote adhesion of the coating (C23C14/027 takes precedence)} - C23C 14/588: {by mechanical treatment} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract In a process for coating a substrate, a texture (4) is created in a portion of its surface. A first layer (5) to be applied on the surface of the substrate adheres better to the texture (4) than it does to a surface area located outside of the texture (4). Then, the layer (5) is applied to the surface of the substrate and after that, areas of the layer projecting laterally beyond the texture (4) are mechanically removed. The material of the texture (4) contains at least one chemical element or a compound, which the layer (5) does not have or has only in a smaller concentration than the material of the texture (4). On the first layer (5), at least one second layer (7) is then applied which does not have the chemical element or compound contained in the material of the texture (4), or it has it only in a smaller concentration than the material of the texture (4). The process makes it possible to apply to a substrate a textured layer, which has surface properties that remain for the most part unchanged when it is heated. ## Claims ### Claim 1 A process for coating a substrate, comprising the steps of creating at least one silicon-containing texture (4) on a portion of a surface of a silicon oxide layer (2) of a substrate having a silicon base structure (3) on which a first layer (5) is to be applied, the texture (4) comprising a material such that the first layer (5) will adhere better to the texture (4) than to a surface area of the substrate located outside of the texture (4), wherein the material of the texture (4) contains at least one chemical element or chemical compound which is not present in the first layer (5) or is present in the first layer (5) only in a smaller concentration than in the material of the texture (4), applying the first layer (5) on the texture (4) and substrate (3), carrying out a temperature treatment to form a silicide on the substrate after applying the first layer (5), mechanically removing areas of the first layer (5) which project laterally beyond the texture (4), and after the temperature treatment applying on the first layer (5) at least one second layer (7, 9), wherein the at least one second layer (7, 9) does not have the chemical element or chemical compound contained in the material of the texture (4) or the at least one second layer (7, 9) has the chemical element or chemical compound only in a concentration smaller than that of the material of the texture (4). ### Claim 2 (depends on 1) The process according to claim 1, wherein the areas of the first layer (5) projecting laterally beyond the texture (4) are removed prior to application of the second layer (7). ### Claim 3 (depends on 1) The process according to claim 1, wherein the first layer (5) is an electrically conducting layer, and the second layer (7) is applied onto the electrically conducting first layer (5) by galvanic or external currentless deposition of a metal. ### Claim 4 (depends on 1) The process according to claim 1, wherein the second layer (7) is applied on the surface of the substrate after the areas of the first layer (5) projecting laterally beyond the texture (4) have been removed, the adherence properties of the second layer (7) being selected in such a manner that the second layer adheres better to the first layer (5) than to a surface area of the substrate that does not have the first layer (5), and after application of the second layer (7) areas of the second layer (7) projecting laterally beyond the first layer (5) are mechanically removed. ### Claim 5 (depends on 1) The process according to claim 1, wherein first the first layer (5), then on it the second layer (7) and optionally at least one additional layer (9) are applied, and thereafter the areas of these layers (5, 7, 9) projecting laterally beyond the texture (4) are mechanically removed at the same time. ### Claim 6 (depends on 1) The process according to claim 1, wherein the second layer (7) and/or at least one other layer (9) directly or indirectly applied on it is applied at a smaller thickness than the first layer (5). ### Claim 7 (depends on 1) The process according to claim 1, wherein at least one of the layers (5, 7, 9) is mechanically stressed by introduction of foreign atoms prior to removal of the areas projecting laterally beyond the texture (4). ### Claim 8 (depends on 1) The process according to claim 1, wherein the layers (5, 7, 9) comprise the same material. ### Claim 9 (depends on 1) The process according to claim 1, wherein the layers (5, 7, 9) comprise different materials. ### Claim 10 (depends on 1) The process according to claim 1, wherein at least one noble metal layer is applied as an uppermost layer. ### Claim 11 (depends on 1) The process according to claim 1, wherein the areas of the layer(s) projecting laterally beyond the texture (4) are removed by application of ultrasound. ### Claim 12 (depends on 1) The process according to claim 1, wherein the at least one second layer (7, 9) comprises a noble metal. ### Claim 13 (depends on 1) The process according to claim 1, wherein the process is a process for manufacturing a sensor (1).