Multiple detecting apparatus for physical phenomenon and/or chemical phenomenon

A detector assembly for measuring pressure and temperature comprising:

• a semiconductor substrate;
• a diaphragm member extending over an etched portion of the substrate;
• a pyroelectric element mounted on the diaphragm;
• means for measuring a change in pressure applied to the diaphragm, including a plurality of transistors formed on the semiconductor substrate;
• and
• means for measuring temperature, including the pyroelectric element mounted on the diaphragm.

A detector assembly for detecting a plurality of different properties of a specimen, comprising:

• a semiconductor substrate,
• a first detector unit on the substrate for measuring light intensity including a sensing unit to detect light;
• a second detector unit on the substrate for measuring an ion concentration operatively connected to the sensing unit to detect ion concentration;
• a first diffusion region in the substrate adjacent the sensing unit to function as an input diode;
• means for applying a voltage to the first diffusion region;
• a second diffusion region in the substrate adjacent the sensing unit to collect a charge from the sensing unit;
• and
• means for removing a charge from the second diffusion region as an output signal wherein the means for applying a voltage can enable an output signal from the sensing unit to represent measurements of respectively light and ion concentration from a common sensing element.

A detector assembly for detecting light, pressure and temperature, comprising:

• a unitary semiconductor substrate;
• a first portion of the substrate formed into a diaphragm;
• a pressure detector unit including a plurality of channel transistors provided on the diaphragm to detect pressure on the basis of a change in channel conductance of the channel transistors when pressure is applied to the diaphragm;
• a pyroelectric detector unit positioned above the diaphragm wherein the channel transistors and an output of the channel transistors provides a measurement of temperature;
• and
• a photo diode unit positioned on the substrate to measure light.