# US 6,293,680 B1 · Electromagnetically controlled deformable mirror

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- Number: US 6,293,680 B1
- Document ID: US6293680B1
- Status: Granted
- Kind: B1
- Application number: 09/150,866
- Filed: 1998-09-10
- Granted: 2001-09-25
- Earliest claimed: 1997-09-10
- Assignees: Thermotrex Corporation
- Inventors: Donald G. Bruns
- Web page: https://patentgrep.com/patent/US6293680B1

## CPC

- G02B 26/06: for controlling the phase of light (G02B26/08 takes precedence {, measuring optical phase difference G01J9/00})
- G02B 26/0825: {the reflecting element being a flexible sheet or membrane, e.g. for varying the focus (flexible mirrors for cosmetic use A45D42/24)}
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS

## Abstract

A deformable mirror assembly is provided employing a pressure differential across the mirror element to flex the mirror into a configuration. The configuration is determined by an array of positioning members, each having a fixed back end and a movable front end. The invention employs long-stroke electromagnet actuators with built-in position sensing.

## Claims

### Claim 1

A deformable mirror assembly comprising:
a deformable mirror element having a front face and a back face and a perimeter surrounding and connecting the front face and back face;
an array of positioning members, each having a fixed back end and a moveable front end, the array located behind the mirror element;
wherein each positioning member comprises an actuator, comprising:
a first end and a second end;
a yoke fixed relative to the first end;
a coil fixed to the yoke;
an attractive member fixed relative to the second end and selectively attractable to the yoke via energizing the coil; and
an elastically compressible member prebiasing the attractive member away from the yoke;
wherein the compressible member is an elastomer molded in situ between the yoke and the attractive member.