Method for X-ray micro-diffraction measurement and X-ray micro-diffraction apparatus

Abstract

An X-ray micro-diffraction measuring method for detecting X-rays diffracted at a minute portion of a specimen upon irradiating the minute portion with X-rays is disclosed. A cylindrical stimulation type fluorescent member is arranged around the specimen. A sample facet of the specimen is tilted by, for example, 45° with respect to the stimulation type fluorescent member such that the stimulation type fluorescent member can receive both diffracted X-rays passing along a direction tangential to the sample facet and diffracted X-rays passing along a direction perpendicular to the sample facet. Diffracted X-ray images can be obtained on the stimulation type fluorescent by merely rotating the specimen about only the φ axis thereof so as to perform the in-plane rotation without a rotation about the χ axis. By eliminating a rotation about one axis from rotations about two axes for the specimen, it may be possible to avoid a degradation of measurement preciseness due to a crossing error of the two axes. Also, the elimination of the axis mentioned above may cause the structure of the apparatus to be simplified and the time required for the measurement to be shortened.

Dependencies are inferred from the claim text.