Axis alignment method
AssigneeAlliedSignal Inc.
InventorRand H. Hulsing, II
Life of this patent
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Abstract
An apparatus and method for determining the rate of angular rotation of a moving body and, in particular, for alignment of the dither motion and the Coriolis acceleration sensing direction in a sensor adapted to be formed, i.e. micromachined, from a silicon substrate.
Claims29
An axis alignment feature for adjusting the angular orientation of a first device to a second device from which the first device is pliantly suspended, the axis alignment feature comprising:
- a torsion member fixedly disposed between the first and second devices;
- and
- a force member extending from the second device and oriented to rotate the first device relative to the second device.
An axis alignment feature for adjusting an angular orientation of a device relative to a frame from which the device is pliantly suspended, the device and the frame both formed in a substrate, the axis alignment feature comprising:
- a torsionally compliant flexure which is relatively non-compliant in orthogonal axes, the torsionally compliant flexure extending between the device and the frame from which the device is pliantly suspended;
- and
- a heated member mechanically coupled to the frame and oriented to impart a torsional force to said torsionally compliant flexure.
Dependencies are inferred from the claim text.