Color filters formed on integrated circuits
AssigneeTower Semiconductor Ltd.
InventorJeffrey M. Levy
Life of this patent
Estimating the term…
Abstract
Light transmitting filter elements are formed in holes etched in a covering passivation layer overlying light sensing devices formed in an integrated circuit. Filter material is spun on to the wafer to fill the etched holes. The filter material is cured and etched back below the passivation layer top surface. Subsequent filter materials transmitting different light frequencies may be similarly spun on to fill subsequently etched holes, cured, and etched back to form additional filter elements. A contiguous structure of individual filter elements may be formed.
Claims13
An integrated circuit comprising:
- a covering layer overlying at least a portion of said integrated circuit, said covering layer having first holes and second holes formed therein, said first holes being aligned in a first pattern over first selected devices formed in said integrated circuit, said second holes being aligned in a second pattern over second selected devices formed in said integrated circuit;
- a first filter capable of transmitting light at a first selected frequency or range of frequencies formed in said first holes;
- and
- a second filter contiguous with said first filter and capable of transmitting light at a second selected frequency or range of frequencies formed in said second holes;
- wherein selected holes are formed to have a depth greater than the remaining holes.
An integrated circuit comprising:
- a covering layer overlying at least a portion of said integrated circuit, said covering layer having first holes and second holes formed therein, said first holes being aligned in a first pattern over first selected devices formed in said integrated circuit, said second holes being aligned in a second pattern over second selected devices formed in said integrated circuit;
- a first filter capable of transmitting light at a first selected frequency or range of frequencies formed in said first holes;
- and
- a second filter capable of transmitting light at a second selected frequency or range of frequencies formed in said second holes;
- wherein selected holes are formed to have a bottom width greater than a top width.
An integrated circuit comprising:
- a substrate having a passivation layer formed thereon, said passivation layer having a top portion opposite said substrate, said top portion having at least one first hole and at least one second hole formed therein;
- a first filter element formed in said at least one first hole, wherein said first filter element is formed to transmit light of a first frequency or first range of frequencies;
- and
- a second filter element formed in said at least one second hole and to be in contact with said first filter element, wherein said second filter element is formed to transmit light of a second frequency different from said first frequency or a second range of frequencies different from said first range of frequencies;
- wherein said at least one first hole is formed to have a depth greater than said second at least one hole.
Dependencies are inferred from the claim text.