Low loss composition of BaxSryCa1-x-yTiO3: Ba0.12-0.25Sr0.35-0.47Ca0.32-0.53TiO3
AssigneeThe United States of America as represented by the United States Department of Energy
InventorsXiao-Dong Xiang, Hauyee Chang, Ichiro Takeuchi
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Abstract
A dielectric thin-film material for microwave applications, including use as a capacitor, the thin-film comprising a composition of barium strontium calcium and titanium of perovskite type (BaxSryCa1−x−y)TiO3. Also provided is a method for making a dielectric thin film of that formula over a wide compositional range through a single deposition process.
Claims1
A dielectric thin film for microwave applications comprising barium, strontium, calcium, titanium and oxygen of general formula (BaxSryCa1−x−y)TiO3 wherein the mole fraction of barium is approximately 0.12 to 0.25, strontium is approximately 0.35 to 0.47, and calcium is approximately 0.32 to 0.53, said film having a dielectric loss, tan δ, less than 0.02, and dielectric constant, ∈r, between 130-160.
Dependencies are inferred from the claim text.