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US 6,285,040 B1Granted
Internal-logic inspection circuit
AssigneeNEC Corporation
InventorMasaru Sanada
Life of this patent
Estimating the term…
Abstract
An internal-logic inspection circuit in an LSI includes a MOSFET having a first diffused region connected to an internal node of an internal circuit, a second diffused region connected to a diode and a gate connected to a pad. The diode is irradiated with a laser beam while the gate of MOSFET is applied with a gate voltage, and a resultant current is measured for judging the level of the internal node. The diode can be disposed in a space where overlying interconnects are not disposed.
Claims9
A semiconductor device comprising:
- a first-conductivity-type substrate;
- an internal circuit formed on said substrate and having an internal node for signal transmission;
- a MOSFET including a second-conductivity-type diffused region formed on said substrate, and a gate electrode overlying said diffused region for separating said diffused region to first and second regions, said first region being connected to said internal node;
- and
- a judgement diode having a p-n junction formed of said substrate and a third region formed on said substrate and having a second-conductivity-type, said third region being connected to said second region.
2 more elements
Dependencies are inferred from the claim text.