Crack free welding of silicon
AssigneeIntegrated Materials, Inc.
InventorsRaanan Y. Zehavi, Robert L. Davis, David B. Ackard, James W. Govorko
Life of this patent
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Abstract
A method and apparatus for welding together two silicon workpieces (20, 22) without the formation of cracks along the weld. In a first embodiment, current (34, 36) is passed through one or both of the workpieces to heat them to between 600 and 900° C. Then an electric or plasma welder (38, 40) passes along the seam (24) between the workpieces to weld them together. In a second embodiment, current (34) is passed through a silicon plate (60) which either supports the workpieces or is brought into contact with at least one of them, whereby the workpieces are preheated prior to the welding operation.
Claims20
A method of welding together two silicon workpieces, comprising the steps of:
- juxtaposing said two silicon workpieces along a seam to be welded;
- heating said two juxtaposed workpieces to a temperature of at least 600° C. by passing electrical current through silicon physically associated with said two workpieces;
- and
- additionally applying heat to a portion of said workpieces adjacent to a localized portion of said seam to weld said workpieces together.
A welding method, comprising the steps of:
- juxtaposing two silicon members to be welded together along a seam;
- physically contacting at least one of said juxtaposed silicon members to a silicon plate;
- passing a heating current through said silicon plate to heat said plate to a temperature of at least 600° C. and less than 1416° C.;
- and
- welding said two workpieces together by moving a welding tip along said seam and heating localized areas of said two workpieces.
A welding apparatus, comprising:
- a silicon plate having an upper support surface capable of supporting at least one of two juxtaposed workpieces to be joined along a seam;
- two electrodes connected to said silicon plate at two points for connection to an electrical power supply, a current path between said two points capable of heating said silicon plate adjacent to said upper support surface;
- and
- a welding tip positionable along said seam.
Dependencies are inferred from the claim text.