Polymers having O-substituted vinylphenol unit and resist compositions containing them
AssigneeSumitomo Chemical Company, Limited
InventorsYoshiteru Ohta, Sang-tae Kim, Masumi Suetsugu
Life of this patent
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Abstract
A polymer having an O-substituted vinylphenol unit represented by the following formula (I) wherein R1, R2 and R3 represent an alkyl; or R1 and R2, R1 and R3 or R2 and R3 are bound together and respectively form an alkylene; or R2 is methylidyne wherein one bond in the methylidyne is bound to R1, the other bond is bound to R3, and R1 and R3 represent alkylene, and a resist composition comprising the polymer are provided.
Claims17
A polymer having an O-substituted vinylphenol unit represented by the following formula (I)
- wherein R1, R2 and R3 independently represent an alkyl, having 1 to 4 carbon atoms, which may be optionally substituted;
- or R1 and R2, R1 and R3 or R2 and R3 are bound together and respectively form an alkylene, having 2 to 9 carbon atoms, which may be optionally substituted;
- or R2 is methylidyne wherein one bond in the methylidyne is bound to R1, the other bond is bound to R3, and R1 and R3 independently represent alkylene, having 2 to 9 carbon atoms, which may be optionally substituted.
A polymer which has a unit represented by the following formula (Ic) and a unit represented by the following formula (II):
- wherein R11 represent an alkyl, having 1 to 4 carbon atoms, which may be optionally substituted;
- and Z represent an alkylene, having 2 to 9 carbon atoms, which may be optionally substituted.
Dependencies are inferred from the claim text.