Method of producing heat dissipating structure for semiconductor devices

A method of forming a heat-dissipating structure in a semiconductor device, comprising the steps of:

• forming a first insulating layer on a substantially planar underlying layer of the device;
• forming a recess in the first insulating layer, so that a top surface of the first insulating layer has a recessed portion and an unrecessed portion;
• filling the recess with a thermally conductive material to form a lateral heat-dissipating layer;
• planarizing the heat-dissipating layer so that a top surface thereof is coplanar with the unrecessed portion of the first insulating layer;
• forming a second insulating layer on the first insulating layer and the heat-dissipating layer, thereby embedding the heat-dissipating layer between the first insulating layer and the second insulating layer, wherein the heat-dissipating layer is electrically isolated from the underlying layer of the device;
• forming an opening in the second insulating layer and in the unrecessed portion of the first insulating layer thereby exposing a portion of the underlying layer of the device, and
• filling said opening with a metal to make electrical connection to the underlying layer of the device, wherein said electrical connection is electrically isolated from said lateral heat-dissipating layer.