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US 6,284,205 B1Granted
Ozonizing unit ozone generator and ozone-processing system
AssigneeKabushiki Kaisha Toshiba
InventorsTakaaki Murata, Shinji Kobayashi, Ichiro Yamanashi, Yuuji Okita, Shigeru Kawaguchi, Yasuhiro Ogura, Sueo Ando, Michihiko Inaba
Life of this patent
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Abstract
A pair of electrodes (1a, 1b) are formed on one surface of a dielectric substrate (2). A dielectric layer (18) is formed on the surface of the dielectric substrate (2) so as to cover the pair of electrodes (1a, 1b). The pair of electrodes (1a, 1b) have linear electrode elements, respectively. The respective linear electrode elements are arrange at equal intervals.
Claims29
An ozonizing unit comprising an electrode plate including:
- a dielectric substrate;
- a pair of electrodes formed on one surface of the dielectric substrate,
- a dielectric layer formed on the surface of the dielectric substrate so as to cover the pair of electrodes;
- and
- a gas guide facing a surface of the electrode plate on the side of the pair of electrodes at a predetermined distance from the same surface, and a cooling structure fixedly joined to another surface of the electrode plate;
- wherein each of the pair of electrodes has linear electrode elements, and the respective electrode elements of the pair of electrodes are arranged alternately at a predetermined interval;
- and
- the ozonizing unit is adapted for causing a discharge between the pair of electrodes and for subjecting ozone source gas to the discharge to thereby generate ozone from the ozone source gas.
5 more elements
The ozonizing unit according to 1, wherein
- the widths of the respective electrode elements of the pair of electrodes are 200 μm or less.
An ozonizing unit comprising:
- a cooling structure having a cooling water chamber;
- a pair of electrode plates disposed on the opposite surfaces of the cooling structure, each having a dielectric substrate, at least one electrode set comprising first and second electrodes having electrode elements formed at predetermined intervals on one surface of the dielectric substrate, and serving as surface discharge electrodes;
- a dielectric layer formed on the surface of the dielectric substrate so as to cover the electrode;
- gas guides disposed through spacers on the surfaces of the electrode plates provided with the electrode set so as to form discharge spaces, respectively;
- and
- holding plates disposed through elastic members on surfaces of the gas guides on the opposite side of the electrode plates, respectively;
- wherein the ozonizing unit is adapted for causing a discharge between the electrode set and for subjecting ozone source gas to the discharge to thereby generate ozone from the ozone source gas.
4 more elements
An ozone generator comprising a plurality of ozonizing units stacked one after another, each of said ozonizing units comprising:
- an electrode plate including a dielectric substrate, and a pair of electrodes formed on one surface of the dielectric substrate;
- a dielectric layer formed on the surface of the dielectric substrate so as to cover the pair of electrodes;
- a gas guide facing the surface of the electrode plate on the side of the pair of electrodes at a predetermined distance from the same surface so as to form a discharge space into which a gas is supplied;
- a cooling structure having a cooling water chamber and disposed on the other surface of the electrode plate opposite to the surface of the same provided with the pair of electrodes;
- and
- a holding plate placed through elastic members placed on a surface of the gas guide on the opposite side of the electrode plate;
- wherein the ozone generator is adapted for causing a discharge between the electrode set and subjecting ozone source gas to the discharge to thereby generate ozone from the ozone source gas.
4 more elements
A An ozone generator comprising a plurality of ozonizing units stacked one after another, each of said ozonizing units comprising:
- an electrode plate including a dielectric substrate, and a pair of electrodes formed on one surface of the dielectric substrate;
- a dielectric layer formed on the surface of the dielectric substrate so as to cover the pair of electrodes;
- a gas guide facing to the surface of the electrode plate on the side of the pair of electrodes at a predetermined distance from the same surface so as to form a discharge space into which a gas is supplied;
- a cooling structure having a cooling water chamber and disposed on the other surface of the electrode plate opposite to the surface of the same provided with the pair of electrodes;
- and
- a holding plate placed through elastic members placed on a surface of the gas guide on the opposite side of the electrode plate;
- wherein the ozone generator is adapted for a causing discharge between the electrode set and subjecting ozone source gas to the discharge to thereby generate ozone from the ozone source gas.
4 more elements
An ozonizing unit comprising:
- at least a pair of cooling structures, each having a cooling water chamber;
- a pair of electrode plates placed on surfaces of the cooling structure facing each other, and each having a dielectric substrate, and at least a pair of electrodes serving as surface discharge electrodes and having electrode elements arranged at equal intervals on one surface of the dielectric substrate;
- a dielectric layer formed on the surface of the dielectric substrate so as to cover the pair of electrodes;
- and
- a gas guide facing to the surface of the electrode plate on the side of the pair of electrodes at a predetermined distance from the same surface, and a cooling structure fixedly joined to the other surface of the electrode plate;
- wherein the ozonizing unit is adapted for causing discharge between the pair of electrodes and subjecting ozone source gas to the discharge to thereby generate ozone from the ozone source gas.
3 more elements
An ozone generator comprising a plurality of electrode plates stacked one after another, each of the electrode plates having a dielectric substrate, a pair of electrodes formed on one surface of the dielectric substrate;
- a dielectric layer formed on the surface of the dielectric substrate so as to cover the pair of electrodes;
- and
- a gas guide facing the surface of the electrode plate on the side of the pair of electrodes at a predetermined distance from the same surface, and a cooling structure fixedly joined to the other surface of the electrode plate;
- wherein each of the pair of electrodes has linear electrode elements, and the respective electrode elements of the pair of electrodes are arranged alternately at a predetermined interval;
- and
- ozonizing generator is adapted for causing a discharge between the pair of electrodes and subjecting ozone source gas to the discharge to thereby generate ozone from the ozone source gas.
3 more elements
Dependencies are inferred from the claim text.