Cooled window
AssigneeAG Associates (Israel) Ltd.
InventorIgor Fidelman
Life of this patent
Estimating the term…
Abstract
A cooled window assembly for a thermal processing chamber, wherein an object in the chamber is heated by a radiation source outside the chamber emitting radiation that includes infrared radiation. The assembly includes upper and lower transparent plates defining passages therebetween. A cooling fluid flows through the passages, which fluid is substantially transparent to the infrared radiation, such that the infrared radiation from the source passes through the plates and through the fluid in the passages to heat the object. The upper plate is substantially thicker than the lower plate, thus providing the window with mechanical strength sufficient withstand atmospheric pressure when the chamber is evacuated.
Claims10
A cooled window assembly for a thermal processing chamber, wherein an object in the chamber is heated by a radiation source outside the chamber emitting radiation that includes infrared radiation, the assembly comprising:
- upper and lower transparent plates
- segments of a transparent material fixed between the upper and lower plates so as to define passages therebetween;
- and
- a cooling fluid flowing through the passages, which fluid is substantially transparent to the infrared radiation, such that the infrared radiation from the source passes through the plates and through the fluid in the passages to heat the object.
A cooled window assembly for a thermal processing chamber, wherein an object in the chamber is heated by a radiation source outside the chamber emitting radiation that includes infrared radiation, the assembly comprising:
- upper and lower transparent plates defining passages therebetween, wherein the upper plate is substantially thicker than the lower plate;
- and
- a cooling fluid flowing through the passages, which fluid is substantially transparent to the infrared radiation, such that the infrared radiation from the source passes through the plates and through the fluid in the passages to heat the object.
A cooled window assembly for an evacuable thermal processing chamber, wherein an object in the chamber is heated by a radiation source outside the chamber, the assembly comprising:
- an upper transparent plate, positioned adjacent to the radiation source and having a thickness sufficient so that the window assembly is able to withstand atmospheric pressure when the chamber is evacuated;
- a lower transparent plate, positioned adjacent to the object in the chamber and having a thickness substantially less than the thickness of the upper transparent plate;
- and
- supporting pieces fixed between the upper and lower plates so as to provide mechanical support to the lower plate and arranged so as to define passages between the plates through which a cooling fluid passes to cool the plates.
Dependencies are inferred from the claim text.