Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatus
AssigneeFSI International, Inc.
InventorsKevin L. Siefering, Timothy V. Seppanen
Life of this patent
Estimating the term…
Abstract
Transport system that allows in-process microelectronic devices inside a chamber to be easily moved, regardless of whether the chamber is open or sealed. Advantageously, the source of in-process device motion is located outside of the chamber, while the motion is transferred to the wafer via a polymeric bellows. Inside the chamber, there are no parts of the system that rub against other componentry. Consequently, the system generates little, if any, contaminants.
Claims22
An apparatus for processing a microelectronic device, comprising:
- (a) a chamber in which the microelectronic device is positioned during a treatment, said chamber comprising at least one through portal;
- (b) a transport mechanism upon which the microelectronic device is supported and transportable through a range of motion comprising a first position to a second position;
- (c) a polymeric, closed bellows environmentally sealing the portal of the chamber, said bellows having a fixed end and a moveable end, wherein the moveable end is operationally coupled to the transport mechanism such that actuation of the moveable end causes a corresponding movement of the transport mechanism to allow transport of the microelectronic device.
An apparatus for processing a microelectronic device with one or more process gases, comprising:
- (a) an enclosure defining a chamber in which the microelectronic device is positioned during a treatment, said chamber comprising a wall having a pocket;
- and
- (b) a transport mechanism comprising a moveable member that is transported through a range of motion comprising a loading position and a processing position, said member being positioned at least partially in the pocket when the member is in the processing position.
Dependencies are inferred from the claim text.