Diaphragm-support disc for a polishing machine and method of operating a polishing machine
AssigneeSTMicroelectronics S.r.l.
InventorLuc Liauzu
Life of this patent
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AssigneeSTMicroelectronics S.r.l.
InventorLuc Liauzu
Estimating the term…
A diaphragm-support disc for a polishing machine of the type in which a work piece to be polished is sandwiched between a radial front face of a diaphragm and a polishing surface or cloth. The diaphragm is extended across and wrapped around the peripheral edge of a radial front face of the disc, and a radial rear face of the diaphragm is subjected to pressure from a fluid. The diaphragm-support disc includes a main annular part that projects from the radial front face of the disc and is located in a peripheral region of the radial front face of the disc a predetermined distance from the peripheral edge of the radial front face of the disc. The main annular part can act on the work piece through the diaphragm so as to press the work piece onto the polishing surface or cloth by an axial displacement of the disc with respect to the polishing surface or cloth. In a preferred embodiment, a shorter secondary annular part projects from the radial front face of the disc on the peripheral edge of the radial front face of the disc some distance from the main annular part. A method of operating a polishing machine to polish a work piece is also provided.
A diaphragm-support disc for a polishing machine of the type in which a work piece to be polished is sandwiched between a radial front face of a diaphragm and a polishing surface or cloth, the diaphragm being extended across a radial front face of the disc and wrapped around a peripheral edge of the radial front face of the disc, and a radial rear face of the diaphragm being subjected to pressure from a fluid, said diaphragm-support disc comprising:
A polishing machine for polishing a work piece, said polishing machine comprising:
A method of operating a polishing machine to polish a work piece, the polishing machine of the type including:
Dependencies are inferred from the claim text.